| Presentation | 2016-01-28 [Invited Talk] Carrier Transport Analysis of High-Performance Poly-Si Nanowire Transistor Fabricated by Advanced SPC with Record-High Electron Mobility Minoru Oda, Kiwamu Sakuma, Yuuichi Kamimuta, Masumi Saitoh, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | High-performance poly-Si nanowire transistors were fabricated by Advanced SPC process, in which the process of forming a poly-Si film is optimized. Temperature and surface carrier density (Ns) dependence of mobility, and also correlation between grain size and mobility are investigated in order to determine what limits the mobility in the poly-Si channel. As a result, it is suggested that the hole mobility is dominated by phonon scattering, and that the electron mobility is dominated by surface roughness scattering at high Ns and coulomb scattering at low Ns which is attributed to defects in grains although scattering at grain boundaries has been thought to be dominant in the poly-Si transistors. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | poly-Si / TFT / mobility / SPC |
| Paper # | SDM2015-121 |
| Date of Issue | 2016-01-21 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2016/1/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Tatsuya Kunikiyo(Renesas) |
| Secretary | Tatsuya Kunikiyo(Tohoku Univ.) |
| Assistant | Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Carrier Transport Analysis of High-Performance Poly-Si Nanowire Transistor Fabricated by Advanced SPC with Record-High Electron Mobility |
| Sub Title (in English) | |
| Keyword(1) | poly-Si |
| Keyword(2) | TFT |
| Keyword(3) | mobility |
| Keyword(4) | SPC |
| 1st Author's Name | Minoru Oda |
| 1st Author's Affiliation | Toshiba Corporation(Toshiba Corp.) |
| 2nd Author's Name | Kiwamu Sakuma |
| 2nd Author's Affiliation | Toshiba Corporation(Toshiba Corp.) |
| 3rd Author's Name | Yuuichi Kamimuta |
| 3rd Author's Affiliation | Toshiba Corporation(Toshiba Corp.) |
| 4th Author's Name | Masumi Saitoh |
| 4th Author's Affiliation | Toshiba Corporation(Toshiba Corp.) |
| Date | 2016-01-28 |
| Paper # | SDM2015-121 |
| Volume (vol) | vol.115 |
| Number (no) | SDM-440 |
| Page | pp.pp.5-8(SDM), |
| #Pages | 4 |
| Date of Issue | 2016-01-21 (SDM) |