| Presentation | 2016-01-20 [Invited Lecture] State-of-the-art technology of gallium oxide power devices Masataka Higashiwaki, Man Hoi Wong, Keita Konishi, Kohei Sasaki, Ken Goto, Kazushiro Nomura, Quang Tu Thieu, Rie Togashi, Hisashi Murakami, Yoshinao Kumagai, Bo Monemar, Akinori Koukitu, Akito Kuramata, Takekazu Masui, Shigenobu Yamakoshi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Gallium oxide (Ga{$_{2}$}O{$_{3}$}) is one of oxide semiconductors and has excellent material properties for power device applications. Another important advantage of Ga{$_{2}$}O{$_{3}$} is that large-area and high-quality wafers can be produced with simple and low-cost methods. From these features, Ga{$_{2}$}O{$_{3}$} has been attracting much attention as a new wide bandgap semiconductor following SiC and GaN. In this report, we introduce recent main progress of field-plated lateral Ga{$_{2}$}O{$_{3}$} metal-oxide-semiconductor field-effect transistors and vertical Ga{$_{2}$}O{$_{3}$} Schottky barrier diodes with drift layers grown by halide vapor phase epitaxy. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | gallium oxide / field plate / metal-oxide-semiconductor field-effect transistor (MOSFET) / halide vapor phase epitaxy / Schottky barrier diode |
| Paper # | ED2015-114 |
| Date of Issue | 2016-01-13 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2016/1/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Power Devices and High-frequency Devices, Microwave, etc. |
| Chair | Koichi Maezawa(Univ. of Toyama) |
| Vice Chair | Kunio Tsuda(Toshiba) |
| Secretary | Kunio Tsuda(NEC) |
| Assistant | Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Device |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Lecture] State-of-the-art technology of gallium oxide power devices |
| Sub Title (in English) | |
| Keyword(1) | gallium oxide |
| Keyword(2) | field plate |
| Keyword(3) | metal-oxide-semiconductor field-effect transistor (MOSFET) |
| Keyword(4) | halide vapor phase epitaxy |
| Keyword(5) | Schottky barrier diode |
| 1st Author's Name | Masataka Higashiwaki |
| 1st Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 2nd Author's Name | Man Hoi Wong |
| 2nd Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 3rd Author's Name | Keita Konishi |
| 3rd Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 4th Author's Name | Kohei Sasaki |
| 4th Author's Affiliation | Tamura Corporation/National Institute of Information and Communications Technology(Tamura/NICT) |
| 5th Author's Name | Ken Goto |
| 5th Author's Affiliation | Tamura Corporation/Tokyo University of Agriculture and Technology(Tamura/TAT) |
| 6th Author's Name | Kazushiro Nomura |
| 6th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 7th Author's Name | Quang Tu Thieu |
| 7th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 8th Author's Name | Rie Togashi |
| 8th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 9th Author's Name | Hisashi Murakami |
| 9th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 10th Author's Name | Yoshinao Kumagai |
| 10th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 11th Author's Name | Bo Monemar |
| 11th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 12th Author's Name | Akinori Koukitu |
| 12th Author's Affiliation | Tokyo University of Agriculture and Technology(TAT) |
| 13th Author's Name | Akito Kuramata |
| 13th Author's Affiliation | Tamura Corporation(Tamura) |
| 14th Author's Name | Takekazu Masui |
| 14th Author's Affiliation | Tamura Corporation(Tamura) |
| 15th Author's Name | Shigenobu Yamakoshi |
| 15th Author's Affiliation | Tamura Corporation(Tamura) |
| Date | 2016-01-20 |
| Paper # | ED2015-114 |
| Volume (vol) | vol.115 |
| Number (no) | ED-402 |
| Page | pp.pp.13-18(ED), |
| #Pages | 6 |
| Date of Issue | 2016-01-13 (ED) |