| Presentation | 2016-01-28 Plasma treatment for source/drain regions of self-aligned InGaZnO thin-film transistors Yusaku Magari, Tatsuya Toda, Hisao Makino, Mamoru Furuta, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | EID2015-31 |
| Date of Issue | 2016-01-21 (EID) |
| Conference Information | |
| Committee | EID / ITE-IDY / IEE-EDD / SID-JC / IEIJ-SSL |
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| Conference Date | 2016/1/28(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Toyama Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Joint Meeting of Emissive / Non-Emissive Displays |
| Chair | Tomokazu Shiga(Univ. of Electro-Comm.) / Keiichi Betsui(Hitachi) |
| Vice Chair | Mutsumi Kimura(Ryukoku Univ.) / Yuko Kominami(Shizuoka Univ.) |
| Secretary | Mutsumi Kimura(NTT) / Yuko Kominami(Tokyo Inst. of Tech.) / (Shizuoka Univ.) |
| Assistant | Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Takashi Kojiri(ZEON) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Samsung) |
| Paper Information | |
| Registration To | Technical Committee on Electronic Information Displays / Technical Group on Information Display / Technical Group on Electron Devices / Society for Information Display Japan Chapter / * |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Plasma treatment for source/drain regions of self-aligned InGaZnO thin-film transistors |
| Sub Title (in English) | Effects of substrate bias during the plasma treatment of IGZO. |
| Keyword(1) | |
| 1st Author's Name | Yusaku Magari |
| 1st Author's Affiliation | Kochi University of Technology(Kochi Univ. of Technol.) |
| 2nd Author's Name | Tatsuya Toda |
| 2nd Author's Affiliation | Kochi University of Technology(Kochi Univ. of Technol.) |
| 3rd Author's Name | Hisao Makino |
| 3rd Author's Affiliation | Kochi University of Technology(Kochi Univ. of Technol.) |
| 4th Author's Name | Mamoru Furuta |
| 4th Author's Affiliation | Kochi University of Technology(Kochi Univ. of Technol.) |
| Date | 2016-01-28 |
| Paper # | EID2015-31 |
| Volume (vol) | vol.115 |
| Number (no) | EID-439 |
| Page | pp.pp.41-44(EID), |
| #Pages | 4 |
| Date of Issue | 2016-01-21 (EID) |