Presentation 2016-01-29
Luminescence property of hexagonal boron nitride films grown on sapphire substrates by low-pressure CVD
Takaki Shimizu, Naoki Umehara, Atsushi Masuda, Kana Watanabe, Tetsuya Kouno, Hiroko Kominami, Kazuhiko Hara,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The luminescence property of the hexagonal boron nitride (h-BN) thin films grown on c-plane sapphire substrates by chemical vapor deposition using BCl3 and NH3 as sources was characterized by cathodoluminescence (CL). The intensity of the emission band located at 214 nm, which can be ascribed to the recombination of free excitons of h-BN by comparison with that of the h-BN bulk crystal, increased with decreasing a reactor pressure from 20 to 5 kPa at a growth temperature of 1200 C. The influences of growth reaction and film formation on the film quality were discussed in terms of the observed CL properties and its dependence on growth conditions.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) hexagonal boron nitride / CVD / thin film / cathodoluminescence / excitonic luminescence
Paper # EID2015-38
Date of Issue 2016-01-21 (EID)

Conference Information
Committee EID / ITE-IDY / IEE-EDD / SID-JC / IEIJ-SSL
Conference Date 2016/1/28(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Toyama Univ.
Topics (in Japanese) (See Japanese page)
Topics (in English) Joint Meeting of Emissive / Non-Emissive Displays
Chair Tomokazu Shiga(Univ. of Electro-Comm.) / Keiichi Betsui(Hitachi)
Vice Chair Mutsumi Kimura(Ryukoku Univ.) / Yuko Kominami(Shizuoka Univ.)
Secretary Mutsumi Kimura(NTT) / Yuko Kominami(Tokyo Inst. of Tech.) / (Shizuoka Univ.)
Assistant Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Takashi Kojiri(ZEON) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Samsung)

Paper Information
Registration To Technical Committee on Electronic Information Displays / Technical Group on Information Display / Technical Group on Electron Devices / Society for Information Display Japan Chapter / *
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Luminescence property of hexagonal boron nitride films grown on sapphire substrates by low-pressure CVD
Sub Title (in English)
Keyword(1) hexagonal boron nitride
Keyword(2) CVD
Keyword(3) thin film
Keyword(4) cathodoluminescence
Keyword(5) excitonic luminescence
1st Author's Name Takaki Shimizu
1st Author's Affiliation Shizuoka University(Shizuoka Univ.)
2nd Author's Name Naoki Umehara
2nd Author's Affiliation Shizuoka University(Shizuoka Univ.)
3rd Author's Name Atsushi Masuda
3rd Author's Affiliation Shizuoka University(Shizuoka Univ.)
4th Author's Name Kana Watanabe
4th Author's Affiliation Shizuoka University(Shizuoka Univ.)
5th Author's Name Tetsuya Kouno
5th Author's Affiliation Shizuoka University(Shizuoka Univ.)
6th Author's Name Hiroko Kominami
6th Author's Affiliation Shizuoka University(Shizuoka Univ.)
7th Author's Name Kazuhiko Hara
7th Author's Affiliation Shizuoka University(Shizuoka Univ.)
Date 2016-01-29
Paper # EID2015-38
Volume (vol) vol.115
Number (no) EID-439
Page pp.pp.97-100(EID),
#Pages 4
Date of Issue 2016-01-21 (EID)