Presentation | 2016-01-29 Luminescence property of hexagonal boron nitride films grown on sapphire substrates by low-pressure CVD Takaki Shimizu, Naoki Umehara, Atsushi Masuda, Kana Watanabe, Tetsuya Kouno, Hiroko Kominami, Kazuhiko Hara, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The luminescence property of the hexagonal boron nitride (h-BN) thin films grown on c-plane sapphire substrates by chemical vapor deposition using BCl3 and NH3 as sources was characterized by cathodoluminescence (CL). The intensity of the emission band located at 214 nm, which can be ascribed to the recombination of free excitons of h-BN by comparison with that of the h-BN bulk crystal, increased with decreasing a reactor pressure from 20 to 5 kPa at a growth temperature of 1200 C. The influences of growth reaction and film formation on the film quality were discussed in terms of the observed CL properties and its dependence on growth conditions. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | hexagonal boron nitride / CVD / thin film / cathodoluminescence / excitonic luminescence |
Paper # | EID2015-38 |
Date of Issue | 2016-01-21 (EID) |
Conference Information | |
Committee | EID / ITE-IDY / IEE-EDD / SID-JC / IEIJ-SSL |
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Conference Date | 2016/1/28(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Toyama Univ. |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Joint Meeting of Emissive / Non-Emissive Displays |
Chair | Tomokazu Shiga(Univ. of Electro-Comm.) / Keiichi Betsui(Hitachi) |
Vice Chair | Mutsumi Kimura(Ryukoku Univ.) / Yuko Kominami(Shizuoka Univ.) |
Secretary | Mutsumi Kimura(NTT) / Yuko Kominami(Tokyo Inst. of Tech.) / (Shizuoka Univ.) |
Assistant | Rumiko Yamaguchi(Akita Univ.) / Hiroyuki Nitta(Japan Display) / Mitsuru Nakata(NHK) / Takashi Kojiri(ZEON) / Ryosuke Nonaka(Toshiba) / Takeshi Okuno(Samsung) |
Paper Information | |
Registration To | Technical Committee on Electronic Information Displays / Technical Group on Information Display / Technical Group on Electron Devices / Society for Information Display Japan Chapter / * |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Luminescence property of hexagonal boron nitride films grown on sapphire substrates by low-pressure CVD |
Sub Title (in English) | |
Keyword(1) | hexagonal boron nitride |
Keyword(2) | CVD |
Keyword(3) | thin film |
Keyword(4) | cathodoluminescence |
Keyword(5) | excitonic luminescence |
1st Author's Name | Takaki Shimizu |
1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
2nd Author's Name | Naoki Umehara |
2nd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
3rd Author's Name | Atsushi Masuda |
3rd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
4th Author's Name | Kana Watanabe |
4th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
5th Author's Name | Tetsuya Kouno |
5th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
6th Author's Name | Hiroko Kominami |
6th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
7th Author's Name | Kazuhiko Hara |
7th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
Date | 2016-01-29 |
Paper # | EID2015-38 |
Volume (vol) | vol.115 |
Number (no) | EID-439 |
Page | pp.pp.97-100(EID), |
#Pages | 4 |
Date of Issue | 2016-01-21 (EID) |