| Presentation | 2015-11-26 Study on AlGaN formation on alpha-(AlGa)2O3 by surface nitridation using radio frequency nitrogen plasma Tsutomu Araki, Akira Buma, Nao Masuda, Yasushi Nanishi, Masaya Oda, Toshimi Hitora, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2015-68,CPM2015-103,LQE2015-100 |
| Date of Issue | 2015-11-19 (ED, CPM, LQE) |
| Conference Information | |
| Committee | ED / LQE / CPM |
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| Conference Date | 2015/11/26(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Osaka City University Media Center |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Nitride Semiconductor Devices, Materials, Related Technologies |
| Chair | Koichi Maezawa(Univ. of Toyama) / Hajime Shoji(Sumitomo Electric Industries) / Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Kunio Tsuda(Toshiba) / Susumu Noda(Kyoto Univ.) / Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Kunio Tsuda(NEC) / Susumu Noda(JAIST) / Fumihiko Hirose(NICT) |
| Assistant | Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) / / Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Electron Device / Technical Committee on Lasers and Quantum Electronics / Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on AlGaN formation on alpha-(AlGa)2O3 by surface nitridation using radio frequency nitrogen plasma |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Tsutomu Araki |
| 1st Author's Affiliation | Ritsumeikan University(Ritsumeikan Univ.) |
| 2nd Author's Name | Akira Buma |
| 2nd Author's Affiliation | Ritsumeikan University(Ritsumeikan Univ.) |
| 3rd Author's Name | Nao Masuda |
| 3rd Author's Affiliation | Ritsumeikan University(Ritsumeikan Univ.) |
| 4th Author's Name | Yasushi Nanishi |
| 4th Author's Affiliation | Ritsumeikan University(Ritsumeikan Univ.) |
| 5th Author's Name | Masaya Oda |
| 5th Author's Affiliation | FLOSFIA INC.(FLOSFIA) |
| 6th Author's Name | Toshimi Hitora |
| 6th Author's Affiliation | FLOSFIA INC.(FLOSFIA) |
| Date | 2015-11-26 |
| Paper # | ED2015-68,CPM2015-103,LQE2015-100 |
| Volume (vol) | vol.115 |
| Number (no) | ED-329,CPM-330,LQE-331 |
| Page | pp.pp.1-4(ED), pp.1-4(CPM), pp.1-4(LQE), |
| #Pages | 4 |
| Date of Issue | 2015-11-19 (ED, CPM, LQE) |