| Presentation | 2015-12-02 Effective Routing Pattern Generation with an Optimum Tertiary Routing Algorithm for Self-Aligned Quadruple Patterning Takeshi Ihara, Atsushi Takahashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Self-Aligned Quadruple Patterning (SAQP) is an important manufacturing technique for sub 14 nm technology node. Although various routing algorithms for SAQP have been proposed, it is not easy to find a dense SAQP compliant routing pattern efficiently. Even though a grid for SAQP compliant routing pattern was proposed, it is not easy to find a valid routing pattern on the grid. The routing pattern of SAQP on the grid consists of three types of routing. Among them, third type has turn prohibition constraint on the grid. Typical routing algorithms often fail to find a valid routing for third type. In this paper, SAQP compliant two dimensional routing patterns are found on the grid by finding an optimal valid tertiary pattern effectively. Experiments show that SAQP compliant routing patterns are found efficiently. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SAQP / Routing Algorithm / Turn Probition Constraint |
| Paper # | VLD2015-53,DC2015-49 |
| Date of Issue | 2015-11-24 (VLD, DC) |
| Conference Information | |
| Committee | VLD / DC / IPSJ-SLDM / CPSY / RECONF / ICD / CPM |
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| Conference Date | 2015/12/1(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagasaki Kinro Fukushi Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2015 -New Field of VLSI Design- |
| Chair | Yusuke Matsunaga(Kyushu Univ.) / Nobuyasu Kanekawa(Hitachi) / Masahiro Fukui(Ritsumeikan Univ.) / Yasuhiko Nakashima(NAIST) / Minoru Watanabe(Shizuoka Univ.) / Minoru Fujishima(Hiroshima Univ.) / Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Takashi Takenana(NEC) / Michiko Inoue(NAIST) / / Koji Nakano(Hiroshima Univ.) / Hidetsugu Irie(Univ. of Tokyo) / Masato Motomura(Hokkaido Univ.) / Yuichiro Shibata(Nagasaki Univ.) / Hideto Hidaka(Renesas) / Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Takashi Takenana(Ritsumeikan Univ.) / Michiko Inoue(Fujitsu Labs.) / (RTRI) / Koji Nakano(Kyoto Sangyo Univ.) / Hidetsugu Irie(Sharp) / Masato Motomura(Kitakyushu City Univ.) / Yuichiro Shibata(Toshiba) / Hideto Hidaka(Fujitsu Labs.) / Fumihiko Hirose(NII) |
| Assistant | Ittetsu Taniguchi(Ritsumeikan Univ.) / / / Shinya Takameda(NAIST) / Takeshi Ohkawa(Utsunomiya Univ.) / Kazuya Tanikagawa(Hiroshima City Univ.) / Takefumi Miyoshi(e-trees.Japan) / Makoto Takamiya(Univ. of Tokyo) / Hiroe Iwasaki(NTT) / Takashi Hashimoto(Panasonic) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.) / Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on VLSI Design Technologies / Technical Committee on Dependable Computing / Special Interest Group on System and LSI Design Methodology / Technical Committee on Computer Systems / Technical Committee on Reconfigurable Systems / Technical Committee on Integrated Circuits and Devices / Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effective Routing Pattern Generation with an Optimum Tertiary Routing Algorithm for Self-Aligned Quadruple Patterning |
| Sub Title (in English) | |
| Keyword(1) | SAQP |
| Keyword(2) | Routing Algorithm |
| Keyword(3) | Turn Probition Constraint |
| 1st Author's Name | Takeshi Ihara |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Atsushi Takahashi |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| Date | 2015-12-02 |
| Paper # | VLD2015-53,DC2015-49 |
| Volume (vol) | vol.115 |
| Number (no) | VLD-338,DC-339 |
| Page | pp.pp.93-98(VLD), pp.93-98(DC), |
| #Pages | 6 |
| Date of Issue | 2015-11-24 (VLD, DC) |