| Presentation | 2015-12-02 Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer Katsuya Hoshi, Kunihiro Fujiyoshi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Since electron beam mask writers for LSI mask fabrication can only expose a rectangle shaped-beam, a layout pattern has to be decomposed into a set of rectangles, and then they are fabricated by the mask writing machine. Because of the increase of transistors in one chip, the number of rectangles in a layout is increased, so manufacturing cost is also increased. So, a method which decomposes a layout into rectangles and L-Shaped polygons was proposed on the assumption that mask writers can expose a L-Shaped beam. However, this method cannnot always obtain a set of polygons of the minimum number. In this paper, we propose a new algorithm which can decompose a layout into minimum number of rectangles and L-Shaped polygons using dynamic programming. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | L-Shape Fracturing / Dynamic Programming / Variable Shaped Beam Mask Writer / Mask Data |
| Paper # | VLD2015-52,DC2015-48 |
| Date of Issue | 2015-11-24 (VLD, DC) |
| Conference Information | |
| Committee | VLD / DC / IPSJ-SLDM / CPSY / RECONF / ICD / CPM |
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| Conference Date | 2015/12/1(3days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagasaki Kinro Fukushi Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Design Gaia 2015 -New Field of VLSI Design- |
| Chair | Yusuke Matsunaga(Kyushu Univ.) / Nobuyasu Kanekawa(Hitachi) / Masahiro Fukui(Ritsumeikan Univ.) / Yasuhiko Nakashima(NAIST) / Minoru Watanabe(Shizuoka Univ.) / Minoru Fujishima(Hiroshima Univ.) / Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Takashi Takenana(NEC) / Michiko Inoue(NAIST) / / Koji Nakano(Hiroshima Univ.) / Hidetsugu Irie(Univ. of Tokyo) / Masato Motomura(Hokkaido Univ.) / Yuichiro Shibata(Nagasaki Univ.) / Hideto Hidaka(Renesas) / Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Takashi Takenana(Ritsumeikan Univ.) / Michiko Inoue(Fujitsu Labs.) / (RTRI) / Koji Nakano(Kyoto Sangyo Univ.) / Hidetsugu Irie(Sharp) / Masato Motomura(Kitakyushu City Univ.) / Yuichiro Shibata(Toshiba) / Hideto Hidaka(Fujitsu Labs.) / Fumihiko Hirose(NII) |
| Assistant | Ittetsu Taniguchi(Ritsumeikan Univ.) / / / Shinya Takameda(NAIST) / Takeshi Ohkawa(Utsunomiya Univ.) / Kazuya Tanikagawa(Hiroshima City Univ.) / Takefumi Miyoshi(e-trees.Japan) / Makoto Takamiya(Univ. of Tokyo) / Hiroe Iwasaki(NTT) / Takashi Hashimoto(Panasonic) / Hiroyuki Ito(Tokyo Inst. of Tech.) / Pham Konkuha(Univ. of Electro-Comm.) / Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on VLSI Design Technologies / Technical Committee on Dependable Computing / Special Interest Group on System and LSI Design Methodology / Technical Committee on Computer Systems / Technical Committee on Reconfigurable Systems / Technical Committee on Integrated Circuits and Devices / Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Layout Decomposition into L-Shaped Parts for Variable Shaped-Beam Mask Writer |
| Sub Title (in English) | |
| Keyword(1) | L-Shape Fracturing |
| Keyword(2) | Dynamic Programming |
| Keyword(3) | Variable Shaped Beam Mask Writer |
| Keyword(4) | Mask Data |
| 1st Author's Name | Katsuya Hoshi |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| 2nd Author's Name | Kunihiro Fujiyoshi |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| Date | 2015-12-02 |
| Paper # | VLD2015-52,DC2015-48 |
| Volume (vol) | vol.115 |
| Number (no) | VLD-338,DC-339 |
| Page | pp.pp.87-92(VLD), pp.87-92(DC), |
| #Pages | 6 |
| Date of Issue | 2015-11-24 (VLD, DC) |