| Presentation | 2015-12-04 The Technics of predicting error of Semiconductor manufacturing equipment by Operation sounds Daiki Nakata, Noriyuki Kushiro, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In Semiconductor manufacturing factory, Semiconductor manufacturing equipment is always operated in the long term to improve efficiency of manufacturing and stops manufacturing line. Operating of equipment in the long term causes wearing error for the parts of equipment correctly. To avoid this risk, in the factory, they maintain the equipment. However, it is difficult to predict when the equipment will break down and the timing of maintenance is not optimal. In this paper, we use the operating sounds as the factor of diagnosis because operation sounds can catch the sign of error and can be acquired simply as data. We develop the systems to predict error without stopping the equipment by test data and the data of the fields. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Error / Predict / Diagnosis / Semiconductor Manufacturing Equipment / Vacuum Pump / Operation Sounds |
| Paper # | AI2015-23 |
| Date of Issue | 2015-11-27 (AI) |
| Conference Information | |
| Committee | AI |
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| Conference Date | 2015/12/4(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kyutech-Salite |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Toshiharu Sugawara(Waseda Univ.) |
| Vice Chair | Tsunenori Mine(Kyushu Univ.) / Daisuke Katagami(Tokyo Polytechnic Univ.) |
| Secretary | Tsunenori Mine(Ritsumeikan Univ.) / Daisuke Katagami(Shizuoka Univ.) |
| Assistant | Yuichi Sei(Univ. of Electro-Comm.) |
| Paper Information | |
| Registration To | Technical Committee on Artificial Intelligence and Knowledge-Based Processing |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Technics of predicting error of Semiconductor manufacturing equipment by Operation sounds |
| Sub Title (in English) | |
| Keyword(1) | Error |
| Keyword(2) | Predict |
| Keyword(3) | Diagnosis |
| Keyword(4) | Semiconductor Manufacturing Equipment |
| Keyword(5) | Vacuum Pump |
| Keyword(6) | Operation Sounds |
| 1st Author's Name | Daiki Nakata |
| 1st Author's Affiliation | Kyushu Institute of technlogy(Kyutech) |
| 2nd Author's Name | Noriyuki Kushiro |
| 2nd Author's Affiliation | Kyushu Institute of technlogy(Kyutech) |
| Date | 2015-12-04 |
| Paper # | AI2015-23 |
| Volume (vol) | vol.115 |
| Number (no) | AI-337 |
| Page | pp.pp.61-66(AI), |
| #Pages | 6 |
| Date of Issue | 2015-11-27 (AI) |