| Presentation | 2015-10-29 [Invited Talk] Current situation and challenging for ion implantation technology Yoshiki Nakashima, Nariaki Hamamoto, Shigeki Sakai, Hiroshi Onoda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2015-71 |
| Date of Issue | 2015-10-22 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2015/10/29(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Tatsuya Kunikiyo(Renesas) |
| Secretary | Tatsuya Kunikiyo(Tohoku Univ.) |
| Assistant | Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Current situation and challenging for ion implantation technology |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yoshiki Nakashima |
| 1st Author's Affiliation | Nissin Ion Equipment Co. LTD.(NIC) |
| 2nd Author's Name | Nariaki Hamamoto |
| 2nd Author's Affiliation | Nissin Ion Equipment Co. LTD.(NIC) |
| 3rd Author's Name | Shigeki Sakai |
| 3rd Author's Affiliation | Nissin Ion Equipment Co. LTD.(NIC) |
| 4th Author's Name | Hiroshi Onoda |
| 4th Author's Affiliation | Nissin Ion Equipment Co. LTD.(NIC) |
| Date | 2015-10-29 |
| Paper # | SDM2015-71 |
| Volume (vol) | vol.115 |
| Number (no) | SDM-280 |
| Page | pp.pp.1-6(SDM), |
| #Pages | 6 |
| Date of Issue | 2015-10-22 (SDM) |