Presentation 2015-10-23
Design of Low Loss 60 GHz CMOS On-Chip Dipole Antenna By Helium-3 Ion Irradiation
Takuichi Hirano, Ning Li, Kenichi Okada, Akira Matsuzawa, Jiro Hirokawa, Makoto Ando, Tsuyoshi Inoue, Hitoshi Sakane,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) 60 GHz CMOS on-chip antenna is low radiation efficiency due to large loss of silicon (Si) substrate. In this paper, a 60 GHz CMOS on-chip dipole antenna with helium-3 ion irradiated silicon substrate is designed. Rectangular region with 500 um x 1000 um around the dipole is irradiated by helium-3 ion and resistivity is increased from 10 Ohm cm (10 S/m) to 10 k Ohm cm (0.01 S/m). The width of dipole section is wide for broad bandwidth and reduction of conductor loss. There are a taper section and stub for impedance matching. A backing metal reduces back radiation. At 62 GHz, the calculated reflection, radiation efficiency and gain are -15 dB, 48 % and 2.7 dBi, respectively.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Millimeter-wave / On-chip antenna / Dipole antenna / CMOS / Helium ion irradiation / Radiation efficiency
Paper # EMCJ2015-79,MW2015-118,EST2015-89
Date of Issue 2015-10-15 (EMCJ, MW, EST)

Conference Information
Committee EMCJ / IEE-EMC / MW / EST
Conference Date 2015/10/22(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Sakura Hall, Katahira Campus, Tohoku Univ.
Topics (in Japanese) (See Japanese page)
Topics (in English) Microwave, Electromagnetic simulation, EMC, etc.
Chair Hideaki Sone(Tohoku Univ.) / Ken Kawamata(Tohoku Gakuin University) / Yohei Ishikawa(Kyoto Univ.) / Tatsuya Kashiwa(Kitami Inst. of Tech.)
Vice Chair Osami Wada(Kyoto Univ.) / / Masashi Nakatsugawa(NTT) / Takao Kuki(Kokushikan Univ.) / Kenjiro Nishikawa(Kagoshima Univ.) / Hideaki Kimura(NTT) / Akimasa Hirata(Nagoya Inst. of Tech.) / Shinichiro Ohnuki(Nihon Univ.)
Secretary Osami Wada(Okayama Univ.) / (Hitachi) / Masashi Nakatsugawa(Osaka University) / Takao Kuki(National Maritime Research Institute) / Kenjiro Nishikawa(NTT) / Hideaki Kimura(Panasonic) / Akimasa Hirata(Tokyo Inst. of Tech.) / Shinichiro Ohnuki(Muroran Inst. of Tech.)
Assistant Atsuhiro Takahashi(Toyota Central R&D Labs.) / Yoshiki Kayano(Akita Univ.) / Yusaku Katsube(Hitachi) / Yu-chi Hayashi(Tohoku Gakuin University) / Ryo Ishikawa(Univ. of Electro-Comm.) / Naoto Sekiya(Univ. of Yamanashi) / Atsushi Kezuka(ENRI) / Kenji Taguchi(Kitami Inst. of Tech.)

Paper Information
Registration To Technical Committee on Electromagnetic Compatibility / Technical Meeting on Electromagnetic Compatibility / Technical Committee on Microwaves / Technical Committee on Electronics Simulation Technology
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Design of Low Loss 60 GHz CMOS On-Chip Dipole Antenna By Helium-3 Ion Irradiation
Sub Title (in English)
Keyword(1) Millimeter-wave
Keyword(2) On-chip antenna
Keyword(3) Dipole antenna
Keyword(4) CMOS
Keyword(5) Helium ion irradiation
Keyword(6) Radiation efficiency
1st Author's Name Takuichi Hirano
1st Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
2nd Author's Name Ning Li
2nd Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
3rd Author's Name Kenichi Okada
3rd Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
4th Author's Name Akira Matsuzawa
4th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
5th Author's Name Jiro Hirokawa
5th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
6th Author's Name Makoto Ando
6th Author's Affiliation Tokyo Institute of Technology(Tokyo Tech.)
7th Author's Name Tsuyoshi Inoue
7th Author's Affiliation S.H.I. Examination and Inspection, Ltd.(SHIEI)
8th Author's Name Hitoshi Sakane
8th Author's Affiliation S.H.I. Examination and Inspection, Ltd.(SHIEI)
Date 2015-10-23
Paper # EMCJ2015-79,MW2015-118,EST2015-89
Volume (vol) vol.115
Number (no) EMCJ-259,MW-260,EST-261
Page pp.pp.123-127(EMCJ), pp.123-127(MW), pp.123-127(EST),
#Pages 5
Date of Issue 2015-10-15 (EMCJ, MW, EST)