| Presentation | 2015-08-10 Growth of epitaxial SiC thin films on AlN/Si(110) substrates by pulsed laser deposition Shunki Narita, Kazuki Meguro, Hideki Nakazawa, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have grown aluminum nitride (AlN) films on Si(110) substrate by pulsed laser deposition using an AlN target, and investigated the crystallinity and surface morphology of the films. We obtained the AlN layer with the good crystallinity and surface morphology at a laser intensity of 200 mJ/pulse. We formed a SiC interfacial buffer layer on the AlN layer grown at 200 mJ/pulse by ultralow-pressure chemical vapor deposition using monomethylsilane (CH3SiH3), and grew a SiC film on the low-temperature buffer layer by pulsed laser deposition using a SiC target. It was found that the SiC film grown on the buffer layer exhibit a 3C-SiC(111)3x3 reconstructed surface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Silicon carbide / Aluminum nitride / Pulsed laser deposition |
| Paper # | CPM2015-33 |
| Date of Issue | 2015-08-03 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2015/8/10(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Satoru Noge(Numazu National College of Tech.) |
| Vice Chair | Fumihiko Hirose(Yamagata Univ.) |
| Secretary | Fumihiko Hirose(NTT) |
| Assistant | Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of epitaxial SiC thin films on AlN/Si(110) substrates by pulsed laser deposition |
| Sub Title (in English) | |
| Keyword(1) | Silicon carbide |
| Keyword(2) | Aluminum nitride |
| Keyword(3) | Pulsed laser deposition |
| 1st Author's Name | Shunki Narita |
| 1st Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 2nd Author's Name | Kazuki Meguro |
| 2nd Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 3rd Author's Name | Hideki Nakazawa |
| 3rd Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| Date | 2015-08-10 |
| Paper # | CPM2015-33 |
| Volume (vol) | vol.115 |
| Number (no) | CPM-179 |
| Page | pp.pp.11-14(CPM), |
| #Pages | 4 |
| Date of Issue | 2015-08-03 (CPM) |