| Presentation | 2015-07-24 Low Damage Dry Etching for Recessed Gate AlGaN/GaN-HEMTs Yuichi Minoura, Naoya Okamoto, Toshihiro Ohki, Shiro Ozaki, Kozo Makiyama, Yoichi Kamada, Keiji Watanabe, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2015-38 |
| Date of Issue | 2015-07-17 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2015/7/24(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | IT Business Plaza Musashi 5F |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Semiconductor Processes and Devices |
| Chair | Koichi Maezawa(Univ. of Toyama) |
| Vice Chair | Kunio Tsuda(Toshiba) |
| Secretary | Kunio Tsuda(NEC) |
| Assistant | Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Device |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low Damage Dry Etching for Recessed Gate AlGaN/GaN-HEMTs |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yuichi Minoura |
| 1st Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| 2nd Author's Name | Naoya Okamoto |
| 2nd Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| 3rd Author's Name | Toshihiro Ohki |
| 3rd Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| 4th Author's Name | Shiro Ozaki |
| 4th Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| 5th Author's Name | Kozo Makiyama |
| 5th Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| 6th Author's Name | Yoichi Kamada |
| 6th Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| 7th Author's Name | Keiji Watanabe |
| 7th Author's Affiliation | Fujitsu Laboratories Ltd.(Fujitsu Labs.) |
| Date | 2015-07-24 |
| Paper # | ED2015-38 |
| Volume (vol) | vol.115 |
| Number (no) | ED-156 |
| Page | pp.pp.9-13(ED), |
| #Pages | 5 |
| Date of Issue | 2015-07-17 (ED) |