| Presentation | 2015-07-25 Delta-Sigma Strain Sensor Using a Resonant Tunneling Diode Koichi Maezawa, Yuichiro Kakutani, Taishu Nakayama, Takumi Tajika, Masayuki Mori, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | A negative differential resistance (NDR) of resonant tunneling diodes (RTDs) is a basis for high frequency oscillators. Over 1 THz oscillations have been already reported with the RTD oscillators. Besides THz signal sources. the RTD oscillatiors can be a basis for high performance sensors. In this paper we discuss a strain sensor based on the frequency modulation of a RTD oscillator fabricated on a cantilever. Employing frequency $DeltaSigma$ modulation technique, ultra high dynamic range and wide frequency range are expected for this implementation. We discuss the design and fabrication process of the RTD strain sensors, and demonstrate the noise shaping behavior, which is a most important feature of the $DeltaSigma$ modulation. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | resonant tunneling diode / oscillator / piezo effect / $DeltaSigma$ modulation |
| Paper # | ED2015-46 |
| Date of Issue | 2015-07-17 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2015/7/24(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | IT Business Plaza Musashi 5F |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Semiconductor Processes and Devices |
| Chair | Koichi Maezawa(Univ. of Toyama) |
| Vice Chair | Kunio Tsuda(Toshiba) |
| Secretary | Kunio Tsuda(NEC) |
| Assistant | Manabu Arai(New JRC) / Masataka Higashiwaki(NICT) |
| Paper Information | |
| Registration To | Technical Committee on Electron Device |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Delta-Sigma Strain Sensor Using a Resonant Tunneling Diode |
| Sub Title (in English) | |
| Keyword(1) | resonant tunneling diode |
| Keyword(2) | oscillator |
| Keyword(3) | piezo effect |
| Keyword(4) | $DeltaSigma$ modulation |
| 1st Author's Name | Koichi Maezawa |
| 1st Author's Affiliation | University of Toyama(Univ. Toyama) |
| 2nd Author's Name | Yuichiro Kakutani |
| 2nd Author's Affiliation | University of Toyama(Univ. Toyama) |
| 3rd Author's Name | Taishu Nakayama |
| 3rd Author's Affiliation | University of Toyama(Univ. Toyama) |
| 4th Author's Name | Takumi Tajika |
| 4th Author's Affiliation | University of Toyama(Univ. Toyama) |
| 5th Author's Name | Masayuki Mori |
| 5th Author's Affiliation | University of Toyama(Univ. Toyama) |
| Date | 2015-07-25 |
| Paper # | ED2015-46 |
| Volume (vol) | vol.115 |
| Number (no) | ED-156 |
| Page | pp.pp.51-55(ED), |
| #Pages | 5 |
| Date of Issue | 2015-07-17 (ED) |