| Presentation | 2015-06-19 1550nm-Band Highly-Stacked QD Intermixing with Ar Implantation for Photonic Integrated Devices Atsushi Matsumoto, Yuki Takei, Kouichi Akahane, Naokatsu Yamamoto, Tetsuya Kawanishi, Hiroshi Ishikawa, Yuichi Matsushima, Katsuyuki Utaka, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to realize the monolithic optical integrated devices with using highly stacked semiconductor quantum dots structure, we have studied the intermixing technique using Ar plasma of ICP-RIE, and also, fabricated the optical logic gate device integrated with QD-SOA and ring resonator filter. In this paper, we investigated the intermixing technique with Ar ion implantation and showed the peak wavelength shift of about 120 nm. And we indicated one of the factors of intermixing was Ga diffusion by the SIMS analysis. Also, fabricating the broad type LD with the Ar implantation intermixing, we obtained the fine characteristics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Quantum dots / Quantum Dot Intermixing / Ion implantation / Optical integrated device |
| Paper # | OPE2015-12,LQE2015-22 |
| Date of Issue | 2015-06-12 (OPE, LQE) |
| Conference Information | |
| Committee | LQE / OPE |
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| Conference Date | 2015/6/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hajime Shoji(Sumitomo Electric Industries) / Hiroyuki Uenohara(Tokyo Inst. of Tech.) |
| Vice Chair | Susumu Noda(Kyoto Univ.) / Kensuke Ogawa(Fujikura) |
| Secretary | Susumu Noda(NICT) / Kensuke Ogawa(NTT) |
| Assistant | / Takaaki Ishigure(Keio Univ.) / Eiji Yagyu(Mitsubishi Electric) |
| Paper Information | |
| Registration To | Technical Committee on Lasers and Quantum Electronics / Technical Committee on Optoelectronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | 1550nm-Band Highly-Stacked QD Intermixing with Ar Implantation for Photonic Integrated Devices |
| Sub Title (in English) | |
| Keyword(1) | Quantum dots |
| Keyword(2) | Quantum Dot Intermixing |
| Keyword(3) | Ion implantation |
| Keyword(4) | Optical integrated device |
| 1st Author's Name | Atsushi Matsumoto |
| 1st Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 2nd Author's Name | Yuki Takei |
| 2nd Author's Affiliation | Waseda University(Waseda Univ.) |
| 3rd Author's Name | Kouichi Akahane |
| 3rd Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 4th Author's Name | Naokatsu Yamamoto |
| 4th Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 5th Author's Name | Tetsuya Kawanishi |
| 5th Author's Affiliation | National Institute of Information and Communications Technology(NICT) |
| 6th Author's Name | Hiroshi Ishikawa |
| 6th Author's Affiliation | Waseda University(Waseda Univ.) |
| 7th Author's Name | Yuichi Matsushima |
| 7th Author's Affiliation | Waseda University(Waseda Univ.) |
| 8th Author's Name | Katsuyuki Utaka |
| 8th Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2015-06-19 |
| Paper # | OPE2015-12,LQE2015-22 |
| Volume (vol) | vol.115 |
| Number (no) | OPE-106,LQE-107 |
| Page | pp.pp.9-13(OPE), pp.9-13(LQE), |
| #Pages | 5 |
| Date of Issue | 2015-06-12 (OPE, LQE) |