| Presentation | 2015-06-19 Dependence of H2O beam condition produced by a Pt-catalyzed H2-O2reaction on the opening angle of Laval nozzle Yusuke Teraguchi, Ryoichi Tajima, Tomoki Nakamura, Kazumasa Takahashi, Yasuhiro Tamayama, Kanji Yasui, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Nozzle structure in a CVD apparatus using a high-energy H2O produced by a Pt-catalyzed H2 and O2 reaction was examined. Based on theory of compressive gas flow, distribution of the beam temperature, scaling parameter, and average cluster size of the H2O beam generated by conical nozzles were evaluated. As divergent aperture angle of the conical nozzle was changed from 50o to 90 o, H2O beam energy from nozzle throat to nozzle end was estimated to decrease largely. This is due to the difference in adiabatic expansion of the H2O beam depending on the divergent aperture angle. The condensation scaling parameters (*of the H2O beam for all nozzles were less than 100 and the average cluster sizes were estimated less than 1. Therefore, it was speculated that clusters were not formed in the H2O beam in this CVD apparatus. Electrical property of ZnO thin films deposited using the conical nozzles of divergent aperture angle from 50o to 90o was also measured by Hall effect. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | catalytic reaction / high-temperature H2O beam / conical nozzle / cluster size / ZnO film |
| Paper # | EMD2015-16,CPM2015-26,OME2015-29 |
| Date of Issue | 2015-06-12 (EMD, CPM, OME) |
| Conference Information | |
| Committee | EMD / CPM / OME |
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| Conference Date | 2015/6/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Junya Sekikawa(Shizuoka Univ.) / Satoru Noge(Numazu National College of Tech.) / Naoki Matsuda(AIST) |
| Vice Chair | Yoshiteru Abe(NTT) / Fumihiko Hirose(Yamagata Univ.) / Tatsuo Mori(Aichi Inst. of Tech.) |
| Secretary | Yoshiteru Abe(Sumitomo Denso) / Fumihiko Hirose(Fujielectric) / Tatsuo Mori(NTT) |
| Assistant | Shinichi Wada(TMC system) / Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Electromechanical Devices / Technical Committee on Component Parts and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Dependence of H2O beam condition produced by a Pt-catalyzed H2-O2reaction on the opening angle of Laval nozzle |
| Sub Title (in English) | |
| Keyword(1) | catalytic reaction |
| Keyword(2) | high-temperature H2O beam |
| Keyword(3) | conical nozzle |
| Keyword(4) | cluster size |
| Keyword(5) | ZnO film |
| 1st Author's Name | Yusuke Teraguchi |
| 1st Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol) |
| 2nd Author's Name | Ryoichi Tajima |
| 2nd Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol) |
| 3rd Author's Name | Tomoki Nakamura |
| 3rd Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol) |
| 4th Author's Name | Kazumasa Takahashi |
| 4th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol) |
| 5th Author's Name | Yasuhiro Tamayama |
| 5th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol) |
| 6th Author's Name | Kanji Yasui |
| 6th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. Technol) |
| Date | 2015-06-19 |
| Paper # | EMD2015-16,CPM2015-26,OME2015-29 |
| Volume (vol) | vol.115 |
| Number (no) | EMD-103,CPM-104,OME-105 |
| Page | pp.pp.29-34(EMD), pp.29-34(CPM), pp.29-34(OME), |
| #Pages | 6 |
| Date of Issue | 2015-06-12 (EMD, CPM, OME) |