| Presentation | 2015-06-19 Effect of the insertion of N2O added buffer layer on the characteristics of ZnO films grow on glass substrates by catalytic reaction assisted chemical vapor deposition Shingo Kanouchi, Yuki Ishizuka, Yuki Ohashi, Koichiro Oishi, Hironori Katagiri, Yasuhiro Tamayama, Kanji Yasui, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Aiming at the growth of high-quality ZnO films on glass substrates by a new CVD method using a catalytic reaction, effect of N2O-doped seed layer inserted between the ZnO film and glass substrate was investigated. Dimethylzinc (DMZ) and high energy H2O generated by a catalytic reaction were used as zinc and oxygen sources, respectively. Electron mobility of the ZnO films increased by an appropriate N2O-doped seed layer and the maximum mobility of 30.1 cm2/Vs was obtained by the seed layer for 15 s. Optical transmittance in the visible wavelength region of 400-700 nm was also improved by the insertion of the N2O-doped seed layer. Parameter E0 indicating the fluctuation of the sub-bandgap energy of the films was evaluated from optical absorption coefficients at subband gap energy. The E0 decreased by the insertion of the N2O-doped seed layer and was correlated with the electron mobility of the ZnO films. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ZnO / catalytic reaction / high-energy H2O / electron mobility / band edge fluctuation |
| Paper # | EMD2015-15,CPM2015-25,OME2015-28 |
| Date of Issue | 2015-06-12 (EMD, CPM, OME) |
| Conference Information | |
| Committee | EMD / CPM / OME |
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| Conference Date | 2015/6/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Junya Sekikawa(Shizuoka Univ.) / Satoru Noge(Numazu National College of Tech.) / Naoki Matsuda(AIST) |
| Vice Chair | Yoshiteru Abe(NTT) / Fumihiko Hirose(Yamagata Univ.) / Tatsuo Mori(Aichi Inst. of Tech.) |
| Secretary | Yoshiteru Abe(Sumitomo Denso) / Fumihiko Hirose(Fujielectric) / Tatsuo Mori(NTT) |
| Assistant | Shinichi Wada(TMC system) / Takashi Sakamoto(NTT) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Hirotake Kajii(Osaka Univ.) / Dai Taguchi(Tokyo Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Electromechanical Devices / Technical Committee on Component Parts and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Effect of the insertion of N2O added buffer layer on the characteristics of ZnO films grow on glass substrates by catalytic reaction assisted chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | ZnO |
| Keyword(2) | catalytic reaction |
| Keyword(3) | high-energy H2O |
| Keyword(4) | electron mobility |
| Keyword(5) | band edge fluctuation |
| 1st Author's Name | Shingo Kanouchi |
| 1st Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. technol.) |
| 2nd Author's Name | Yuki Ishizuka |
| 2nd Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. technol.) |
| 3rd Author's Name | Yuki Ohashi |
| 3rd Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. technol.) |
| 4th Author's Name | Koichiro Oishi |
| 4th Author's Affiliation | Nagaoka National College of Technology(Nagaoka Nat. Coll. Technol.) |
| 5th Author's Name | Hironori Katagiri |
| 5th Author's Affiliation | Nagaoka National College of Technology(Nagaoka Nat. Coll. Technol.) |
| 6th Author's Name | Yasuhiro Tamayama |
| 6th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. technol.) |
| 7th Author's Name | Kanji Yasui |
| 7th Author's Affiliation | Nagaoka University of Technology(Nagaoka Univ. technol.) |
| Date | 2015-06-19 |
| Paper # | EMD2015-15,CPM2015-25,OME2015-28 |
| Volume (vol) | vol.115 |
| Number (no) | EMD-103,CPM-104,OME-105 |
| Page | pp.pp.23-27(EMD), pp.23-27(CPM), pp.23-27(OME), |
| #Pages | 5 |
| Date of Issue | 2015-06-12 (EMD, CPM, OME) |