| Presentation | 2015-05-28 Multilayer layer graphene synthesis by Microwave Surface Wave Plasma CVD, and high quality according to ultraviolet light shading Susumu Ichimura, Hideo Uchida, Koichi Wakita, Yasuhiko Hayashi, Masayoshi Umeno, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This study is aimed at applying the graphene as biosensor and biomaterials.From the viewpoint of reliability and electrical conductivity, the multi layer graphene is preferred.On the other hand, the transmittance of graphene is an item to be emphasized.In this study, the transmittance T>80% and the sheet resistance Rs<200Ω / □ is defined as the target value.In the formation of graphene, we were conducting research in both thermal CVD method which is generally used and Microwave Surface Wave Plasma CVD method.Several problems arise when the multi layer graphene synthesized by Microwave Surface Wave Plasma CVD method.In this study, we focused on the defect to be generated during the synthesis. We have examined the following factors, ultraviolet light, carbon source, a carrier gas, the charged particle bombardment, the surface state of the growth substrate, etching gas, substrate temperature and heat treatment after growth.In the present study, it has been confirmed that the most adversely affect factor is ultraviolet light. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Graphene / Microwave Surface Wave Plasma CVD / Ultraviolet light / Biosensor / Biomaterials |
| Paper # | ED2015-17,CPM2015-2,SDM2015-19 |
| Date of Issue | 2015-05-21 (ED, CPM, SDM) |
| Conference Information | |
| Committee | ED / CPM / SDM |
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| Conference Date | 2015/5/28(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Venture Business Laboratory, Toyohashi University of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | crystal growth、devices characterization , etc. |
| Chair | Naoki Hara(Fujitsu Labs.) / Yasushi Takano(Shizuoka Univ.) / Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Koichi Maezawa(Univ. of Toyama) / Satoru Noge(Numazu National College of Tech.) / Tatsuya Kunikiyo(Renesas) |
| Secretary | Koichi Maezawa(Hokkaido Univ.) / Satoru Noge(NEC) / Tatsuya Kunikiyo(Kanagawa Univ.) |
| Assistant | Toshikazu Suzuki(JAIST) / Manabu Arai(New JRC) / Nobuyuki Iwata(Nihon Univ.) / Takashi Sakamoto(NTT) / Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Electron Device / Technical Committee on Component Parts and Materials / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Multilayer layer graphene synthesis by Microwave Surface Wave Plasma CVD, and high quality according to ultraviolet light shading |
| Sub Title (in English) | |
| Keyword(1) | Graphene |
| Keyword(2) | Microwave Surface Wave Plasma CVD |
| Keyword(3) | Ultraviolet light |
| Keyword(4) | Biosensor |
| Keyword(5) | Biomaterials |
| 1st Author's Name | Susumu Ichimura |
| 1st Author's Affiliation | Chubu University(Chubu Univ.) |
| 2nd Author's Name | Hideo Uchida |
| 2nd Author's Affiliation | Chubu University(Chubu Univ.) |
| 3rd Author's Name | Koichi Wakita |
| 3rd Author's Affiliation | Chubu University(Chubu Univ.) |
| 4th Author's Name | Yasuhiko Hayashi |
| 4th Author's Affiliation | Okayama University(Okayama Univ.) |
| 5th Author's Name | Masayoshi Umeno |
| 5th Author's Affiliation | Chubu University(Chubu Univ.) |
| Date | 2015-05-28 |
| Paper # | ED2015-17,CPM2015-2,SDM2015-19 |
| Volume (vol) | vol.115 |
| Number (no) | ED-63,CPM-64,SDM-65 |
| Page | pp.pp.5-10(ED), pp.5-10(CPM), pp.5-10(SDM), |
| #Pages | 6 |
| Date of Issue | 2015-05-21 (ED, CPM, SDM) |