| Presentation | 2015-05-22 Development of high-sensitive SOI photodiode by local surface plasmon scattering Atsushi Ono, Yasushi Enomoto, Yasufumi Matsumura, Hiroaki Satoh, Hiroshi Inokawa, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We demonstrated the quantum efficiency (QE) of silicon-oninsulator (SOI) photodiode was enhanced in visible wavelength region by using gold (Au) nanoparticles. The photons plasmonically scattered by Au nanoparticles couples with the waveguide mode in SOI, and are absorbed efficiently. Optimum size and density of Au nanoparticles have been investigated by 3-D FDTD simulations for sensitivity improvement. The highest enhancement factor of the absorption efficiency in 100-nm-thick SOI is obtained by periodically attaching Au nanoparticles of about 140 nm in diameter and 1.7 × 109 particles/cm2 in density. Two-fold enhancement in QE was experimentally achieved in visible by the SOI photodiode with randomly arranged Au nanoparticles of the size and density close to the optimized values. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Photodiode / Surface plasmon / Silicon / Waveguide / Gold Nanoparticle |
| Paper # | LQE2015-12 |
| Date of Issue | 2015-05-14 (LQE) |
| Conference Information | |
| Committee | LQE / LSJ |
|---|---|
| Conference Date | 2015/5/21(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Hajime Shoji(Sumitomo Electric Industries) |
| Vice Chair | Susumu Noda(Kyoto Univ.) |
| Secretary | Susumu Noda(NICT) / (NTT) |
| Assistant | |
| Paper Information | |
| Registration To | Technical Committee on Lasers and Quantum Electronics / * |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of high-sensitive SOI photodiode by local surface plasmon scattering |
| Sub Title (in English) | |
| Keyword(1) | Photodiode |
| Keyword(2) | Surface plasmon |
| Keyword(3) | Silicon |
| Keyword(4) | Waveguide |
| Keyword(5) | Gold Nanoparticle |
| 1st Author's Name | Atsushi Ono |
| 1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 2nd Author's Name | Yasushi Enomoto |
| 2nd Author's Affiliation | Nippon Steel & Sumikin Chemical Co. Ltd.(NSCC) |
| 3rd Author's Name | Yasufumi Matsumura |
| 3rd Author's Affiliation | Nippon Steel & Sumikin Chemical Co. Ltd.(NSCC) |
| 4th Author's Name | Hiroaki Satoh |
| 4th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 5th Author's Name | Hiroshi Inokawa |
| 5th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| Date | 2015-05-22 |
| Paper # | LQE2015-12 |
| Volume (vol) | vol.115 |
| Number (no) | LQE-46 |
| Page | pp.pp.59-62(LQE), |
| #Pages | 4 |
| Date of Issue | 2015-05-14 (LQE) |