Presentation | 2015-04-22 Optimization of the Si substrate on NbN tunnel junctions for the terahertz mixing applications Kazumasa Makise, Hirotaka Terai, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed a niobium nitride superconducting mixer for terahertz band application. The NbN films are epitaxially grown with (100) direction on MgO (100) substrates, while the NbN films on Si substrate is polycrystalline. In this paper, We reported the fabrication technique of (100)-oriented NbN thin films on Si (100) wafers by DC magnetron sputtering method using TiN as a buffer layer. Moreover, the junctions consist of epitaxial NbN/AlN/NbN tunnel junctions using TiN buffer layer fabricated on single-crystal Si(100) substrates. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Tunnel Junction / Niobium nitride / SIS mixer |
Paper # | |
Date of Issue |
Conference Information | |
Committee | SCE |
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Conference Date | 2015/4/22(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Kikaishinkou-kaikan |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | High frequency application, Devices, etc. |
Chair | Keiji Unpuku(Kyushu Univ.) |
Vice Chair | |
Secretary | (Kinki Univ.) |
Assistant | Hiroyuki Akaike(Nagoya Univ.) |
Paper Information | |
Registration To | Technical Committee on Superconductive Electronics |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Optimization of the Si substrate on NbN tunnel junctions for the terahertz mixing applications |
Sub Title (in English) | |
Keyword(1) | Tunnel Junction |
Keyword(2) | Niobium nitride |
Keyword(3) | SIS mixer |
1st Author's Name | Kazumasa Makise |
1st Author's Affiliation | National Instruments of Infomation and communications technology(NICT) |
2nd Author's Name | Hirotaka Terai |
2nd Author's Affiliation | National Instruments of Infomation and communications technology(NICT) |
Date | 2015-04-22 |
Paper # | |
Volume (vol) | vol.115 |
Number (no) | SCE-13 |
Page | pp.pp.-(), |
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Date of Issue |