| Presentation | 2015-04-30 Low Resistivity of poly-Si films by LA Laser Annealing Takashi Noguchi, Tatsuya Okada, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2015-15,OME2015-15 |
| Date of Issue | 2015-04-22 (SDM, OME) |
| Conference Information | |
| Committee | OME / SDM |
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| Conference Date | 2015/4/29(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Oh-hama Nobumoto Memorial Hall |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin FIlms, Functional Electronics Devices, New Functional Materials and Evaluation, BIomtechnology |
| Chair | Keizo Kato(Niigata Univ.) / Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas) |
| Secretary | Naoki Matsuda(Canon Electronics) / Tatsuya Kunikiyo(Aichi Inst. of Tech.) |
| Assistant | Akihiro Kohno(NTT) / Shinichiro Inoue(NICT) / Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low Resistivity of poly-Si films by LA Laser Annealing |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Takashi Noguchi |
| 1st Author's Affiliation | Univeristy of the Ryukyus(Univ. Ryukyus) |
| 2nd Author's Name | Tatsuya Okada |
| 2nd Author's Affiliation | Univeristy of the Ryukyus(Univ. Ryukyus) |
| Date | 2015-04-30 |
| Paper # | SDM2015-15,OME2015-15 |
| Volume (vol) | vol.115 |
| Number (no) | SDM-18,OME-19 |
| Page | pp.pp.57-61(SDM), pp.57-61(OME), |
| #Pages | 5 |
| Date of Issue | 2015-04-22 (SDM, OME) |