| Presentation | 2015-04-17 In-situ infrared absorption spectroscopy of interaction of nanobubbles with solid surfaces Hideyuki Saito, Teng Ma, Hideaki Yamamoto, Ayumi Hirano-Iwata, Michio Niwano, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Using multiple internal reflection spectroscopy, we studied how nanobubbles interact with solid surfaces and removes organic contaminants. Nanobubbles were generated by passing pressurized gas through a porous alumina film. We show that a major organic contaminant in semiconductor processing, dioctyl phthalate (DOP), was efficiently removed from the surface via its exposure to oxygen nanobubbles, whereas no sign of removal was observed with nitrogen nanobubbles. The results suggest chemical interaction as dominant factor in contaminant removal. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | nanobubble / porous alumina / infrared absorption spectroscopy / DOP |
| Paper # | ED2015-10 |
| Date of Issue | 2015-04-09 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2015/4/16(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Laboratory for Nanoelectronics and Spintronics |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Naoki Hara(Fujitsu Labs.) |
| Vice Chair | Koichi Maezawa(Univ. of Toyama) |
| Secretary | Koichi Maezawa(Hokkaido Univ.) |
| Assistant | Toshikazu Suzuki(JAIST) / Manabu Arai(New JRC) |
| Paper Information | |
| Registration To | Technical Committee on Electron Device |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | In-situ infrared absorption spectroscopy of interaction of nanobubbles with solid surfaces |
| Sub Title (in English) | |
| Keyword(1) | nanobubble |
| Keyword(2) | porous alumina |
| Keyword(3) | infrared absorption spectroscopy |
| Keyword(4) | DOP |
| 1st Author's Name | Hideyuki Saito |
| 1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 2nd Author's Name | Teng Ma |
| 2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 3rd Author's Name | Hideaki Yamamoto |
| 3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 4th Author's Name | Ayumi Hirano-Iwata |
| 4th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 5th Author's Name | Michio Niwano |
| 5th Author's Affiliation | Tohoku University(Tohoku Univ.) |
| Date | 2015-04-17 |
| Paper # | ED2015-10 |
| Volume (vol) | vol.115 |
| Number (no) | ED-5 |
| Page | pp.pp.47-52(ED), |
| #Pages | 6 |
| Date of Issue | 2015-04-09 (ED) |