Presentation 2015-04-30
[Invited Talk] Formation of high Sn content SiSn films and its band structure
Masashi Kurosawa, Wakana Takeuchi, Mitsuo Sakashita, Osamu Nakatsuka, Shigeaki Zaima,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) This paper reports our recent progress in advanced Sn-assisted low-temperature crystallization methods for Si$_{1-x}$Sn$_{x}$ alloys ($x: 0-0.3$) on insulators and Ge substrates. Micro-probe Raman spectra and Auger electron spectroscopy depth profiles reveal the presence of the substitutional Sn content as high as 22% in the polycrystalline- and epitaxial-Si$_{1-x}$Sn$_{x}$ layers after annealing at 220℃ for 5 hrs. In addition, the band gap shrinkage due to the Sn incorporation has been demonstrated by Fourier transform infrared spectroscopy measurements.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) group-IV semiconductor / silicon tin (SiSn) / solid phase crystallization
Paper # SDM2015-9,OME2015-9
Date of Issue 2015-04-22 (SDM, OME)

Conference Information
Committee OME / SDM
Conference Date 2015/4/29(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Oh-hama Nobumoto Memorial Hall
Topics (in Japanese) (See Japanese page)
Topics (in English) Thin FIlms, Functional Electronics Devices, New Functional Materials and Evaluation, BIomtechnology
Chair Keizo Kato(Niigata Univ.) / Yuzou Oono(Univ. of Tsukuba)
Vice Chair Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas)
Secretary Naoki Matsuda(Canon Electronics) / Tatsuya Kunikiyo(Aichi Inst. of Tech.)
Assistant Akihiro Kohno(NTT) / Shinichiro Inoue(NICT) / Tadashi Yamaguchi(Renesas)

Paper Information
Registration To Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Formation of high Sn content SiSn films and its band structure
Sub Title (in English) Aiming for direct-band-gap semiconductor
Keyword(1) group-IV semiconductor
Keyword(2) silicon tin (SiSn)
Keyword(3) solid phase crystallization
1st Author's Name Masashi Kurosawa
1st Author's Affiliation Nagoya University(Nagoya Univ.)
2nd Author's Name Wakana Takeuchi
2nd Author's Affiliation Nagoya University(Nagoya Univ.)
3rd Author's Name Mitsuo Sakashita
3rd Author's Affiliation Nagoya University(Nagoya Univ.)
4th Author's Name Osamu Nakatsuka
4th Author's Affiliation Nagoya University(Nagoya Univ.)
5th Author's Name Shigeaki Zaima
5th Author's Affiliation Nagoya University(Nagoya Univ.)
Date 2015-04-30
Paper # SDM2015-9,OME2015-9
Volume (vol) vol.115
Number (no) SDM-18,OME-19
Page pp.pp.35-37(SDM), pp.35-37(OME),
#Pages 3
Date of Issue 2015-04-22 (SDM, OME)