Presentation | 2015-04-30 [Invited Talk] Formation of high Sn content SiSn films and its band structure Masashi Kurosawa, Wakana Takeuchi, Mitsuo Sakashita, Osamu Nakatsuka, Shigeaki Zaima, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | This paper reports our recent progress in advanced Sn-assisted low-temperature crystallization methods for Si$_{1-x}$Sn$_{x}$ alloys ($x: 0-0.3$) on insulators and Ge substrates. Micro-probe Raman spectra and Auger electron spectroscopy depth profiles reveal the presence of the substitutional Sn content as high as 22% in the polycrystalline- and epitaxial-Si$_{1-x}$Sn$_{x}$ layers after annealing at 220℃ for 5 hrs. In addition, the band gap shrinkage due to the Sn incorporation has been demonstrated by Fourier transform infrared spectroscopy measurements. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | group-IV semiconductor / silicon tin (SiSn) / solid phase crystallization |
Paper # | SDM2015-9,OME2015-9 |
Date of Issue | 2015-04-22 (SDM, OME) |
Conference Information | |
Committee | OME / SDM |
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Conference Date | 2015/4/29(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Oh-hama Nobumoto Memorial Hall |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Thin FIlms, Functional Electronics Devices, New Functional Materials and Evaluation, BIomtechnology |
Chair | Keizo Kato(Niigata Univ.) / Yuzou Oono(Univ. of Tsukuba) |
Vice Chair | Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas) |
Secretary | Naoki Matsuda(Canon Electronics) / Tatsuya Kunikiyo(Aichi Inst. of Tech.) |
Assistant | Akihiro Kohno(NTT) / Shinichiro Inoue(NICT) / Tadashi Yamaguchi(Renesas) |
Paper Information | |
Registration To | Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | [Invited Talk] Formation of high Sn content SiSn films and its band structure |
Sub Title (in English) | Aiming for direct-band-gap semiconductor |
Keyword(1) | group-IV semiconductor |
Keyword(2) | silicon tin (SiSn) |
Keyword(3) | solid phase crystallization |
1st Author's Name | Masashi Kurosawa |
1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
2nd Author's Name | Wakana Takeuchi |
2nd Author's Affiliation | Nagoya University(Nagoya Univ.) |
3rd Author's Name | Mitsuo Sakashita |
3rd Author's Affiliation | Nagoya University(Nagoya Univ.) |
4th Author's Name | Osamu Nakatsuka |
4th Author's Affiliation | Nagoya University(Nagoya Univ.) |
5th Author's Name | Shigeaki Zaima |
5th Author's Affiliation | Nagoya University(Nagoya Univ.) |
Date | 2015-04-30 |
Paper # | SDM2015-9,OME2015-9 |
Volume (vol) | vol.115 |
Number (no) | SDM-18,OME-19 |
Page | pp.pp.35-37(SDM), pp.35-37(OME), |
#Pages | 3 |
Date of Issue | 2015-04-22 (SDM, OME) |