Presentation | 2015-04-30 Influence of TEOS-SiO2 cap layer on Au induced lateral crystallization for amorphous Ge on insulator Kazuki Kudo, Kinta Kusano, Takatsugu Sakai, Shinichi Motoyama, Yutaka Kusuda, Masahiro Furuta, Nobuyuki Naka, Tomoko Numata, Kenichiro Takakura, Isao Tsunoda, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | |
Paper # | SDM2015-11,OME2015-11 |
Date of Issue | 2015-04-22 (SDM, OME) |
Conference Information | |
Committee | OME / SDM |
---|---|
Conference Date | 2015/4/29(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | Oh-hama Nobumoto Memorial Hall |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Thin FIlms, Functional Electronics Devices, New Functional Materials and Evaluation, BIomtechnology |
Chair | Keizo Kato(Niigata Univ.) / Yuzou Oono(Univ. of Tsukuba) |
Vice Chair | Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas) |
Secretary | Naoki Matsuda(Canon Electronics) / Tatsuya Kunikiyo(Aichi Inst. of Tech.) |
Assistant | Akihiro Kohno(NTT) / Shinichiro Inoue(NICT) / Tadashi Yamaguchi(Renesas) |
Paper Information | |
Registration To | Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Influence of TEOS-SiO2 cap layer on Au induced lateral crystallization for amorphous Ge on insulator |
Sub Title (in English) | |
Keyword(1) | |
1st Author's Name | Kazuki Kudo |
1st Author's Affiliation | Kumamoto National College of Technology(KNCT) |
2nd Author's Name | Kinta Kusano |
2nd Author's Affiliation | Kumamoto National College of Technology(KNCT) |
3rd Author's Name | Takatsugu Sakai |
3rd Author's Affiliation | Kumamoto National College of Technology(KNCT) |
4th Author's Name | Shinichi Motoyama |
4th Author's Affiliation | SAMCO(SAMCO) |
5th Author's Name | Yutaka Kusuda |
5th Author's Affiliation | SAMCO(SAMCO) |
6th Author's Name | Masahiro Furuta |
6th Author's Affiliation | SAMCO(SAMCO) |
7th Author's Name | Nobuyuki Naka |
7th Author's Affiliation | HORIBA(HORIBA) |
8th Author's Name | Tomoko Numata |
8th Author's Affiliation | HORIBA(HORIBA) |
9th Author's Name | Kenichiro Takakura |
9th Author's Affiliation | Kumamoto National College of Technology(KNCT) |
10th Author's Name | Isao Tsunoda |
10th Author's Affiliation | Kumamoto National College of Technology(KNCT) |
Date | 2015-04-30 |
Paper # | SDM2015-11,OME2015-11 |
Volume (vol) | vol.115 |
Number (no) | SDM-18,OME-19 |
Page | pp.pp.41-44(SDM), pp.41-44(OME), |
#Pages | 4 |
Date of Issue | 2015-04-22 (SDM, OME) |