| Presentation | 2015-04-30 Lateral solid-phase crystallization of a-GeSn on insulator for next generation flexible electronics Ryo Matsumura, Hironori Chikita, Yuki Kai, Masaya Sasaki, Taizoh Sadoh, Hiroshi Ikenoue, Masanobu Miyao, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In order to realize next generation flexible electronics, high carrier mobility materials, such as GeSn, has to be crystallized below softening temperature of reasonable flexible plastic substrates (softening temperature: ~200oC). By combining laser annealing, we have realized solid-phase crystallization of a-GeSn below 200oC on insulating substrates. This technique will be useful to realize next generation flexible electronics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GeSn / solid-phase crystallization / laser annealing |
| Paper # | SDM2015-10,OME2015-10 |
| Date of Issue | 2015-04-22 (SDM, OME) |
| Conference Information | |
| Committee | OME / SDM |
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| Conference Date | 2015/4/29(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Oh-hama Nobumoto Memorial Hall |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin FIlms, Functional Electronics Devices, New Functional Materials and Evaluation, BIomtechnology |
| Chair | Keizo Kato(Niigata Univ.) / Yuzou Oono(Univ. of Tsukuba) |
| Vice Chair | Naoki Matsuda(AIST) / Tatsuya Kunikiyo(Renesas) |
| Secretary | Naoki Matsuda(Canon Electronics) / Tatsuya Kunikiyo(Aichi Inst. of Tech.) |
| Assistant | Akihiro Kohno(NTT) / Shinichiro Inoue(NICT) / Tadashi Yamaguchi(Renesas) |
| Paper Information | |
| Registration To | Technical Committee on Organic Molecular Electronics / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Lateral solid-phase crystallization of a-GeSn on insulator for next generation flexible electronics |
| Sub Title (in English) | |
| Keyword(1) | GeSn |
| Keyword(2) | solid-phase crystallization |
| Keyword(3) | laser annealing |
| 1st Author's Name | Ryo Matsumura |
| 1st Author's Affiliation | Kyushu University/ JSPS Research Fellow(Kyushu Univ./ JSPS) |
| 2nd Author's Name | Hironori Chikita |
| 2nd Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 3rd Author's Name | Yuki Kai |
| 3rd Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 4th Author's Name | Masaya Sasaki |
| 4th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 5th Author's Name | Taizoh Sadoh |
| 5th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 6th Author's Name | Hiroshi Ikenoue |
| 6th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| 7th Author's Name | Masanobu Miyao |
| 7th Author's Affiliation | Kyushu University(Kyushu Univ.) |
| Date | 2015-04-30 |
| Paper # | SDM2015-10,OME2015-10 |
| Volume (vol) | vol.115 |
| Number (no) | SDM-18,OME-19 |
| Page | pp.pp.39-40(SDM), pp.39-40(OME), |
| #Pages | 2 |
| Date of Issue | 2015-04-22 (SDM, OME) |