| Presentation | 2024-01-25 Optimization of GaN MOCVD growth conditions using simulation Naoki Yoshioka, Susumu Hatakenaka, Ryohei Nonoda, Yoshiki Kojima, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOCVD / GaN |
| Paper # | ED2023-66,MW2023-158 |
| Date of Issue | 2024-01-18 (ED, MW) |
| Conference Information | |
| Committee | ED / MW |
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| Conference Date | 2024/1/25(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Seiya Sakai(Hokkaido Univ.) / Kensuke Okubo(Okayama Prefectural Univ.) |
| Vice Chair | Manabu Arai(Nagoya Univ.) / Atsushi Sanada(Osaka Univ.) / Akihito Hirai(Mitsubishi Electric) |
| Secretary | Manabu Arai(Saga Univ.) / Atsushi Sanada(Mitsubishi Electric) / Akihito Hirai(Univ. of Electro-Comm) |
| Assistant | Masatoshi Koyama(Osaka Inst. of Tech.) / Tomohiro Yoshida(SUMITOMO ELECTRIC DEVICE INNOVATIONS) / Tomoyuki Furuichi(Tohoku Univ.) / Kosuke Katayama(NIT Tokuyama College) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices / Technical Committee on Microwaves |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optimization of GaN MOCVD growth conditions using simulation |
| Sub Title (in English) | |
| Keyword(1) | MOCVD |
| Keyword(2) | GaN |
| 1st Author's Name | Naoki Yoshioka |
| 1st Author's Affiliation | Mitsubishi Electric Corporation(Mitsubishi Elec. Corp.) |
| 2nd Author's Name | Susumu Hatakenaka |
| 2nd Author's Affiliation | Mitsubishi Electric Corporation(Mitsubishi Elec. Corp.) |
| 3rd Author's Name | Ryohei Nonoda |
| 3rd Author's Affiliation | Mitsubishi Electric Corporation(Mitsubishi Elec. Corp.) |
| 4th Author's Name | Yoshiki Kojima |
| 4th Author's Affiliation | Mitsubishi Electric Corporation(Mitsubishi Elec. Corp.) |
| Date | 2024-01-25 |
| Paper # | ED2023-66,MW2023-158 |
| Volume (vol) | vol.123 |
| Number (no) | ED-365,MW-366 |
| Page | pp.pp.4-6(ED), pp.4-6(MW), |
| #Pages | 3 |
| Date of Issue | 2024-01-18 (ED, MW) |