| Presentation | 2023-12-07 Fabrication of Hafnium Nitride Spindt-type Field Emitter Arrays by Triode High Power Pulsed Magnetron Sputtering Shun Kondo, Takeo Nakano, Md. Suruz Mian, Masayoshi Nagao, Hiromasa Murata, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have been attempting to fabricate Spindt-type emitter using the triode high-power pulsed magnetron sputtering (t-HPPMS) method, a kind of ionized sputtering technique. The vacuum deposition method has been used so far to form emitter cone in the Spindt-type emitter fabrication. If the sputtering method can be substituted, it will be achieved to use compound material suitable for emitter in addition to large area deposition. In t-HPPMS system, the plasma potential can be controlled by applying a positive bias to the cap electrode that is in contact with the plasma. Therefore, the direction of the sputtered particles can be aligned with the normal direction to the substrate. In this study, we will report on the fabrication of HfN emitters by controlling the hole diameter of Al for lift-off layer and the cap voltage of t-HPPMS. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Spindt-type Field Emitter Arrays / Hafnium Nitride / Triode High Power Pulsed Magnetron Sputtering |
| Paper # | ED2023-41 |
| Date of Issue | 2023-11-30 (ED) |
| Conference Information | |
| Committee | ED |
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| Conference Date | 2023/12/7(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | WINC AICHI |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Applications of electron and ion beam |
| Chair | Seiya Sakai(Hokkaido Univ.) |
| Vice Chair | Manabu Arai(Nagoya Univ.) |
| Secretary | Manabu Arai(Saga Univ.) |
| Assistant | Masatoshi Koyama(Osaka Inst. of Tech.) / Tomohiro Yoshida(SUMITOMO ELECTRIC DEVICE INNOVATIONS) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of Hafnium Nitride Spindt-type Field Emitter Arrays by Triode High Power Pulsed Magnetron Sputtering |
| Sub Title (in English) | |
| Keyword(1) | Spindt-type Field Emitter Arrays |
| Keyword(2) | Hafnium Nitride |
| Keyword(3) | Triode High Power Pulsed Magnetron Sputtering |
| 1st Author's Name | Shun Kondo |
| 1st Author's Affiliation | Seikei University/AIST(Seikei University/AIST) |
| 2nd Author's Name | Takeo Nakano |
| 2nd Author's Affiliation | Seikei University(Seikei University) |
| 3rd Author's Name | Md. Suruz Mian |
| 3rd Author's Affiliation | Seikei University(Seikei University) |
| 4th Author's Name | Masayoshi Nagao |
| 4th Author's Affiliation | AIST(AIST) |
| 5th Author's Name | Hiromasa Murata |
| 5th Author's Affiliation | AIST(AIST) |
| Date | 2023-12-07 |
| Paper # | ED2023-41 |
| Volume (vol) | vol.123 |
| Number (no) | ED-297 |
| Page | pp.pp.11-14(ED), |
| #Pages | 4 |
| Date of Issue | 2023-11-30 (ED) |