Presentation 2023-11-09
[Invited Talk] Quantum Transport Simulation for Analysis of Surface Roughness Scattering in Semiconductor Nanosheet
Jo Okada, Hajime Tanaka, Nobuya Mori,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English)
Keyword(in Japanese) (See Japanese page)
Keyword(in English)
Paper # SDM2023-65
Date of Issue 2023-11-02 (SDM)

Conference Information
Committee SDM
Conference Date 2023/11/9(2days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English) Process, Device, Circuit simulation, etc.
Chair Shunichiro Ohmi(Tokyo Inst. of Tech.)
Vice Chair Tatsuya Usami(Rapidus)
Secretary Tatsuya Usami(Tohoku Univ.)
Assistant Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(Western Digital)

Paper Information
Registration To Technical Committee on Silicon Device and Materials
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Quantum Transport Simulation for Analysis of Surface Roughness Scattering in Semiconductor Nanosheet
Sub Title (in English)
Keyword(1)
1st Author's Name Jo Okada
1st Author's Affiliation Osaka University(Osaka Univ.)
2nd Author's Name Hajime Tanaka
2nd Author's Affiliation Osaka University(Osaka Univ.)
3rd Author's Name Nobuya Mori
3rd Author's Affiliation Osaka University(Osaka Univ.)
Date 2023-11-09
Paper # SDM2023-65
Volume (vol) vol.123
Number (no) SDM-250
Page pp.pp.10-15(SDM),
#Pages 6
Date of Issue 2023-11-02 (SDM)