| Presentation | 2023-11-27 SMR based on epitaxial ScAlN piezoelectric thin films/epitaxial acoustic Bragg reflector Satoshi Tokai, Takahiko Yanagitani, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Single crystalline piezoelectric thin films possess higher power durability and Q factor than polycrystalline ones. However, since acoustic Bragg reflectors are generally composed of polycrystalline or amorphous materials in SMR, it is difficult to fabricate single crystalline piezoelectric layers on acoustic Bragg reflector. In this study, the acoustic Bragg reflector itself was epitaxially grown from the substrate using epitaxial growth technique, which is one of the typical fabrication methods for single crystalline thin films. Furthermore, the bottom electrode and piezoelectric layer were epitaxially grown on epitaxial acoustic Bragg reflector. The crystal orientation of the epitaxial thin film was evaluated by X-ray diffraction and the impedance characteristic of epitaxial SMR were measured by a network analyzer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | BAW filter / SMR / Epitaxial growth / ScAlN piezoelectric thin films |
| Paper # | US2023-55 |
| Date of Issue | 2023-11-20 (US) |
| Conference Information | |
| Committee | US |
|---|---|
| Conference Date | 2023/11/27(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Shizuoka University |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Ultrasonics, etc. |
| Chair | Yasuaki Watanabe(Tokyo Metropolitan Univ.) |
| Vice Chair | Kentaro Nakamura(Tokyo Inst. of Tech.) / Subaru Kudo(Ishinomaki Senshu Univ.) |
| Secretary | Kentaro Nakamura(Tohoku Univ.) / Subaru Kudo(Tokyo Metropolitan Univ.) |
| Assistant | Ayumu Osumi(Nihon Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Ultrasonics |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | SMR based on epitaxial ScAlN piezoelectric thin films/epitaxial acoustic Bragg reflector |
| Sub Title (in English) | |
| Keyword(1) | BAW filter |
| Keyword(2) | SMR |
| Keyword(3) | Epitaxial growth |
| Keyword(4) | ScAlN piezoelectric thin films |
| 1st Author's Name | Satoshi Tokai |
| 1st Author's Affiliation | Waseda University(Waseda Univ.) |
| 2nd Author's Name | Takahiko Yanagitani |
| 2nd Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2023-11-27 |
| Paper # | US2023-55 |
| Volume (vol) | vol.123 |
| Number (no) | US-286 |
| Page | pp.pp.67-72(US), |
| #Pages | 6 |
| Date of Issue | 2023-11-20 (US) |