| Presentation | 2023-12-01 Fabrication of vertical AlGaN-based UV-B LD Toma Nishibayashi, Ryosuke Kondo, Eri Matsubara, Ryoya Yamada, Yoshinori Imoto, Koki Hattori, Sho Iwayama, Tetsuya Takeuchi, Satoshi Kamiyama, Motoaki Iwaya, Hideto Miyake, Kohei Miyoshi, Koichi Naniwae, Akihiko Yamaguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this study, we report on the fabrication method and characteristics of vertical UV-B laser diodes, which are advantageous for high-current operation and capable of high-power operation. To realize vertical devices, it is necessary to establish a method for exfoliating insulating sapphire substrates and AlN layers, a method for supporting the layer structure of the exfoliated device, and a technique for forming smooth optical cavity edge surfaces. In this report, we first describe the results of our investigations into establishing a substrate exfoliated technique using a laser lift-off method, selecting a support substrate, and establishing an edge face formation technique by cleavage of the device fixed on the support substrate. We also report the results of the evaluation of vertical AlGaN-based UV-B laser diodes fabricated using these processes under room temperature pulses. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | semiconductor / laser diode / UV-B region (Wavelength range from 280 nm to 315 nm) / vertical |
| Paper # | ED2023-33,CPM2023-75,LQE2023-73 |
| Date of Issue | 2023-11-23 (ED, CPM, LQE) |
| Conference Information | |
| Committee | LQE / ED / CPM |
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| Conference Date | 2023/11/30(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Kosuke Nishimura(KDDI Research) / Seiya Sakai(Hokkaido Univ.) / Hideki Nakazawa(Hirosaki Univ.) |
| Vice Chair | Atsushi Yamaguchi(Kanazawa Inst. of Tech.) / Manabu Arai(Nagoya Univ.) / Tomoaki Terasako(Ehime Univ.) |
| Secretary | Atsushi Yamaguchi(Fujitsu) / Manabu Arai(Yokohama National Univ.) / Tomoaki Terasako(Saga Univ.) |
| Assistant | Keita Mochiduki(Yokohama National Univ.) / Masatoshi Koyama(Osaka Inst. of Tech.) / Tomohiro Yoshida(SUMITOMO ELECTRIC DEVICE INNOVATIONS) / Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Lasers and Quantum Electronics / Technical Committee on Electron Devices / Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of vertical AlGaN-based UV-B LD |
| Sub Title (in English) | |
| Keyword(1) | semiconductor |
| Keyword(2) | laser diode |
| Keyword(3) | UV-B region (Wavelength range from 280 nm to 315 nm) |
| Keyword(4) | vertical |
| 1st Author's Name | Toma Nishibayashi |
| 1st Author's Affiliation | Meijo University(Meijo Univ.) |
| 2nd Author's Name | Ryosuke Kondo |
| 2nd Author's Affiliation | Meijo University(Meijo Univ.) |
| 3rd Author's Name | Eri Matsubara |
| 3rd Author's Affiliation | Meijo University(Meijo Univ.) |
| 4th Author's Name | Ryoya Yamada |
| 4th Author's Affiliation | Meijo University(Meijo Univ.) |
| 5th Author's Name | Yoshinori Imoto |
| 5th Author's Affiliation | Meijo University(Meijo Univ.) |
| 6th Author's Name | Koki Hattori |
| 6th Author's Affiliation | Meijo University(Meijo Univ.) |
| 7th Author's Name | Sho Iwayama |
| 7th Author's Affiliation | Meijo University(Meijo Univ.) |
| 8th Author's Name | Tetsuya Takeuchi |
| 8th Author's Affiliation | Meijo University(Meijo Univ.) |
| 9th Author's Name | Satoshi Kamiyama |
| 9th Author's Affiliation | Meijo University(Meijo Univ.) |
| 10th Author's Name | Motoaki Iwaya |
| 10th Author's Affiliation | Meijo University(Meijo Univ.) |
| 11th Author's Name | Hideto Miyake |
| 11th Author's Affiliation | Mie University(Mie Univ.) |
| 12th Author's Name | Kohei Miyoshi |
| 12th Author's Affiliation | Ushio Inc.(Ushio Inc.) |
| 13th Author's Name | Koichi Naniwae |
| 13th Author's Affiliation | Ushio Inc.(Ushio Inc.) |
| 14th Author's Name | Akihiko Yamaguchi |
| 14th Author's Affiliation | Seishin Trading Co. Ltd.(Seishin Trading Co. Ltd.) |
| Date | 2023-12-01 |
| Paper # | ED2023-33,CPM2023-75,LQE2023-73 |
| Volume (vol) | vol.123 |
| Number (no) | ED-288,CPM-289,LQE-290 |
| Page | pp.pp.84-87(ED), pp.84-87(CPM), pp.84-87(LQE), |
| #Pages | 4 |
| Date of Issue | 2023-11-23 (ED, CPM, LQE) |