| Presentation | 2023-11-09 [Invited Talk] Current Status and Future Prospects of GaN Vertical Power Devices on GaN substrates Jun Suda, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recent progress of GaN vertical power devices which fabricated on n-type GaN bulk substates. Fundamental properties of GaN (impact ionization and Zener band-to-band tunneling), progress of GaN bulk substrate developments, device fabrication processes such as epitaxial growth, ion implantation and MOS interface are reviewed. Future challenges toward commercialization of GaN vertical devices are also discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | GaN / vertical power devices / MOS / ion implantation / electrical properties |
| Paper # | SDM2023-63 |
| Date of Issue | 2023-11-02 (SDM) |
| Conference Information | |
| Committee | SDM |
|---|---|
| Conference Date | 2023/11/9(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process, Device, Circuit simulation, etc. |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Usami(Rapidus) |
| Secretary | Tatsuya Usami(Tohoku Univ.) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(Western Digital) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Current Status and Future Prospects of GaN Vertical Power Devices on GaN substrates |
| Sub Title (in English) | |
| Keyword(1) | GaN |
| Keyword(2) | vertical power devices |
| Keyword(3) | MOS |
| Keyword(4) | ion implantation |
| Keyword(5) | electrical properties |
| 1st Author's Name | Jun Suda |
| 1st Author's Affiliation | Nagoya University(Nagoya Univ.) |
| Date | 2023-11-09 |
| Paper # | SDM2023-63 |
| Volume (vol) | vol.123 |
| Number (no) | SDM-250 |
| Page | pp.pp.7-7(SDM), |
| #Pages | 1 |
| Date of Issue | 2023-11-02 (SDM) |