| Presentation | 2023-10-13 [Invited Talk] statistical analysis of random telegraphic noise dependence on operating condition using electrical characteristic measurement platform Takezo Mawaki, Rihito Kuroda, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We refer to the overall measurement system composed of array test circuits and other equipment as the electrical characterization measurement platform technology, which statistically evaluates electrical characteristics of various semiconductor devices. In this work, random telegraph noise (RTN) of a large number of MOSFETs was measured for each of rectangular and trapezoidal shaped gates, different isolation structures, and buried channel under various drain-to-source voltage (VDS) conditions were analyzed. It was found that RTN is dominated by traps at the minimum gate width in the channel formed under each of the operating VDS conditions. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | RTN / Array Test Circuit / MOSFETs / Drain-to-Source Voltage / Electrical Characteristic Measurement Platform |
| Paper # | SDM2023-57 |
| Date of Issue | 2023-10-06 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2023/10/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Usami(Rapidus) |
| Secretary | Tatsuya Usami(Tohoku Univ.) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(Western Digital) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] statistical analysis of random telegraphic noise dependence on operating condition using electrical characteristic measurement platform |
| Sub Title (in English) | |
| Keyword(1) | RTN |
| Keyword(2) | Array Test Circuit |
| Keyword(3) | MOSFETs |
| Keyword(4) | Drain-to-Source Voltage |
| Keyword(5) | Electrical Characteristic Measurement Platform |
| 1st Author's Name | Takezo Mawaki |
| 1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
| 2nd Author's Name | Rihito Kuroda |
| 2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
| Date | 2023-10-13 |
| Paper # | SDM2023-57 |
| Volume (vol) | vol.123 |
| Number (no) | SDM-211 |
| Page | pp.pp.21-26(SDM), |
| #Pages | 6 |
| Date of Issue | 2023-10-06 (SDM) |