| Presentation | 2023-10-13 Formation and basic evaluation of gallium oxide thin film on sapphire substrate Fuminobu Imaizumi, Takumi Morita, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Recently, the development of wide bandgap semiconductor materials has become increasingly important. In particular, there has been much development of optical and power devices. Gallium oxide in many materials is a wide bandgap material (Eg = 4.4~5.3 eV) and is expected to be applied to power devices with high breakdown voltage and low loss energy. In this study, Gallium oxide thin films were formed by RF sputtering and their basic crystal structures were investigated by XRD. Ga2O3 films were deposited on sapphire and LiNbO3 substrates, and the dependence of the orientation on annealing temperature was investigated. In addition, the cross-sectional structure was investigated and the uniformity of the thin films was evaluated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Gallium Oxide / Sapphire Substrate |
| Paper # | SDM2023-59 |
| Date of Issue | 2023-10-06 (SDM) |
| Conference Information | |
| Committee | SDM |
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| Conference Date | 2023/10/13(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niche, Tohoku Univ. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Process Science and New Process Technology |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Tatsuya Usami(Rapidus) |
| Secretary | Tatsuya Usami(Tohoku Univ.) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(Western Digital) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Formation and basic evaluation of gallium oxide thin film on sapphire substrate |
| Sub Title (in English) | |
| Keyword(1) | Gallium Oxide |
| Keyword(2) | Sapphire Substrate |
| 1st Author's Name | Fuminobu Imaizumi |
| 1st Author's Affiliation | National Institute of Technology, Oyama College(NIT, Oyama college) |
| 2nd Author's Name | Takumi Morita |
| 2nd Author's Affiliation | National Institute of Technology, Oyama College(NIT, Oyama college) |
| Date | 2023-10-13 |
| Paper # | SDM2023-59 |
| Volume (vol) | vol.123 |
| Number (no) | SDM-211 |
| Page | pp.pp.34-39(SDM), |
| #Pages | 6 |
| Date of Issue | 2023-10-06 (SDM) |