Presentation | 2023-10-31 Characterization and Analysis of TiN Films on MgO Substrate to Clarify the Detection Mechanism of Superconducting Single-Photon Detectors Tsubasa Ishimura, Hiroki Kutsuma, Taro Yamashita, |
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PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | To clarify the correlation between the crystallinity of the films and detector performance and to establish the guideline principles for improving the performance, we characterized TiN films with good lattice matching to the MgO(100) substrate. Compared with previous studies, TiN films with lattice constant closer to those of bulk TiN crystals and the MgO(100) substrate were obtained under conditions where the substrate was not heated. Also, critical temperature, resistivity, and penetration depth could be controlled in the range of 160 ~ 280 nm by the N2 flow ratio. The critical current density of the fabricated TiN wire was found to be 14 ~ 24% of the depairing current density. Finally, it was found that Ar ion beam irradiation can improve the penetration depth of TiN films and reduce the critical current density. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | SSPD / penetration depth / current distribution |
Paper # | SCE2023-22 |
Date of Issue | 2023-10-23 (SCE) |
Conference Information | |
Committee | SCE |
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Conference Date | 2023/10/30(2days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | RIEC, Tohoku Univ. |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | Superconducting Electronics |
Chair | Shigehito Miki(NICT) |
Vice Chair | |
Secretary | (Kanazawa Inst. of Tech.) |
Assistant | Hiroyuki Akaike(Daido Univ.) |
Paper Information | |
Registration To | Technical Committee on Superconductive Electronics |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Characterization and Analysis of TiN Films on MgO Substrate to Clarify the Detection Mechanism of Superconducting Single-Photon Detectors |
Sub Title (in English) | |
Keyword(1) | SSPD |
Keyword(2) | penetration depth |
Keyword(3) | current distribution |
1st Author's Name | Tsubasa Ishimura |
1st Author's Affiliation | Tohoku University(Tohoku Univ.) |
2nd Author's Name | Hiroki Kutsuma |
2nd Author's Affiliation | Tohoku University(Tohoku Univ.) |
3rd Author's Name | Taro Yamashita |
3rd Author's Affiliation | Tohoku University(Tohoku Univ.) |
Date | 2023-10-31 |
Paper # | SCE2023-22 |
Volume (vol) | vol.123 |
Number (no) | SCE-234 |
Page | pp.pp.49-53(SCE), |
#Pages | 5 |
Date of Issue | 2023-10-23 (SCE) |