| Presentation | 2023-10-27 Mechanical properties and heat resistance of Si- and N-doped diamond-like carbon films Yuya Yamazaki, Yuya Sasaki, Hideki Nakazawa, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Silicon- and nitrogen-doped diamond-like carbon (Si?N?DLC) films have been deposited by plasma-enhanced chemical vapor deposition using H2 and Ar as the dilution gases. We investigated the effects of hydrogen flow ratio [H2/(H2+Ar)] on the mechanical properties and heat resistance of the films. As the H2 flow ratio increased, the critical load (adhesion) increased, resulting from a decrease in internal stress. When the hydrogen flow ratio varied, the friction coefficient and specific wear rate remained almost unchanged. Although the friction coefficient and specific wear rate changed little after heat treatment at 550°C regardless of hydrogen flow ratio, those of the films heat-treated at 600°C tended to increase at higher hydrogen flow ratios. This is probably due to changes in the film structure caused by hydrogen desorption. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Diamond-like carbon / Plasma-enhanced chemical vapor deposition / Mechanical properties / Heat resistance |
| Paper # | MRIS2023-17,CPM2023-51,OME2023-38 |
| Date of Issue | 2023-10-19 (MRIS, CPM, OME) |
| Conference Information | |
| Committee | MRIS / CPM / ITE-MMS / OME |
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| Conference Date | 2023/10/26(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Niigata Univ. Ekiminami Campus |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Spintronics, Solid State Memory, Functional material, Thin film process, Material, Devices, etc. |
| Chair | Ikuya Tagawa(Tohoku Inst. of Tech.) / Hideki Nakazawa(Hirosaki Univ.) / 町田 賢司(NHK) / Eiji Itoh(Shinshu Univ.) |
| Vice Chair | / Tomoaki Terasako(Ehime Univ.) / / Akira Baba(Niigata Univ.) |
| Secretary | (Ehime Univ.) / Tomoaki Terasako(Samsung) / (Shinshu Univ.) / Akira Baba(Kitami Inst. of Tech) |
| Assistant | Nobuaki Kikuchi(Tohoku Univ.) / Toshiki Yamaji(AIST) / Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / / Yoshiyuki Seike(Aichi Inst. of Tech.) / PANDEY Shyam sudhir(Kyushu Inst. of Tech.) |
| Paper Information | |
| Registration To | Technical Committee on Magnetic Recording & Information Storage / Technical Committee on Component Parts and Materials / Technical Group on Multi-media Storage / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Mechanical properties and heat resistance of Si- and N-doped diamond-like carbon films |
| Sub Title (in English) | |
| Keyword(1) | Diamond-like carbon |
| Keyword(2) | Plasma-enhanced chemical vapor deposition |
| Keyword(3) | Mechanical properties |
| Keyword(4) | Heat resistance |
| 1st Author's Name | Yuya Yamazaki |
| 1st Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 2nd Author's Name | Yuya Sasaki |
| 2nd Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| 3rd Author's Name | Hideki Nakazawa |
| 3rd Author's Affiliation | Hirosaki University(Hirosaki Univ.) |
| Date | 2023-10-27 |
| Paper # | MRIS2023-17,CPM2023-51,OME2023-38 |
| Volume (vol) | vol.123 |
| Number (no) | MRIS-229,CPM-230,OME-231 |
| Page | pp.pp.33-36(MRIS), pp.33-36(CPM), pp.33-36(OME), |
| #Pages | 4 |
| Date of Issue | 2023-10-19 (MRIS, CPM, OME) |