Presentation 2023-08-25
[Invited Talk] Data-driven fabrication of optical waveguide devices - smartphotonics(R) -
Kenya Suzki, Keita Yamaguchi, Masashi Ota, Mikihiro Kurosawa, Yoshinori Hibino,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Compared to electronic devices such as general LSIs, the fabrication of optical waveguide devices is largely dependent on the experience of skilled engineers and trial-and-error fabrication methods. In this report, we introduce a manufacturing method for fabricating optical devices that utilizes process data in the manufacturing process.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Optical waveguide / optical devices / smartphotonics / process feedforwarding
Paper # R2023-30,EMD2023-25,CPM2023-35,OPE2023-74,LQE2023-21
Date of Issue 2023-08-17 (R, EMD, CPM, OPE, LQE)

Conference Information
Committee LQE / OPE / CPM / EMD / R
Conference Date 2023/8/24(2days)
Place (in Japanese) (See Japanese page)
Place (in English) Tohoku university
Topics (in Japanese) (See Japanese page)
Topics (in English) Photodetectors, Modulators, Optical Electrical device packaging and reliability
Chair Kosuke Nishimura(KDDI Research) / Taro Arakawa(Yokohama National Univ.) / Hideki Nakazawa(Hirosaki Univ.) / Takahiro Ueno(Nippon Inst. of Tech.) / Yasushi Kadota(Ricoh)
Vice Chair Atsushi Yamaguchi(Kanazawa Inst. of Tech.) / / Tomoaki Terasako(Ehime Univ.) / / Hiroyuki Okamura(Hiroshima Univ.)
Secretary Atsushi Yamaguchi(Fujitsu) / (Yokohama National Univ.) / Tomoaki Terasako(Kanto Gakuin Univ.) / (NTT) / Hiroyuki Okamura(Shinshu Univ.)
Assistant Keita Mochiduki(Yokohama National Univ.) / Takshi Fujisawa(Hokaido Univ.) / Hideyuki Nasu(Furukawa Electric) / Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Yuichi Nakamura(Toyohashi Univ. of Tech.) / Yoshiki Kayano(Univ. of Electro-Comm.) / Naoki Fukuda(Teikyo Univ.) / Shinji Yokogawa(Univ. of Electro-Comm.) / Takahide Yoshikawa(Fujitsu Lab.) / Shuhei Ota(Kanagawa Univ.)

Paper Information
Registration To Technical Committee on Lasers and Quantum Electronics / Technical Committee on OptoElectronics / Technical Committee on Component Parts and Materials / Technical Committee on Electromechanical Devices / Technical Committee on Reliability
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) [Invited Talk] Data-driven fabrication of optical waveguide devices - smartphotonics(R) -
Sub Title (in English)
Keyword(1) Optical waveguide
Keyword(2) optical devices
Keyword(3) smartphotonics
Keyword(4) process feedforwarding
1st Author's Name Kenya Suzki
1st Author's Affiliation Nippon Telegraph and Telephone Corp(NTT)
2nd Author's Name Keita Yamaguchi
2nd Author's Affiliation Nippon Telegraph and Telephone Corp(NTT)
3rd Author's Name Masashi Ota
3rd Author's Affiliation Nippon Telegraph and Telephone Corp(NTT)
4th Author's Name Mikihiro Kurosawa
4th Author's Affiliation NTT Innovative Devices Corporation(NTT DevIces)
5th Author's Name Yoshinori Hibino
5th Author's Affiliation NTT Innovative Devices Corporation(NTT DevIces)
Date 2023-08-25
Paper # R2023-30,EMD2023-25,CPM2023-35,OPE2023-74,LQE2023-21
Volume (vol) vol.123
Number (no) R-158,EMD-159,CPM-160,OPE-161,LQE-162
Page pp.pp.67-70(R), pp.67-70(EMD), pp.67-70(CPM), pp.67-70(OPE), pp.67-70(LQE),
#Pages 4
Date of Issue 2023-08-17 (R, EMD, CPM, OPE, LQE)