| Presentation | 2023-08-18 The Influence of Humidity on the Transient Characteristics of MEMS Semiconductor Gas Sensors Varying with Gas Species Kunihiro Azuma, Takefumi Yoshikawa, Yuki Okura, Tatsuya Iwata, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2023-10 |
| Date of Issue | 2023-08-11 (ED) |
| Conference Information | |
| Committee | ED / IEE-BMS / IEE-MSS |
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| Conference Date | 2023/8/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Seiya Sakai(Hokkaido Univ.) |
| Vice Chair | Manabu Arai(Nagoya Univ.) |
| Secretary | Manabu Arai(Saga Univ.) / (Mitsubishi Electric) |
| Assistant | Masatoshi Koyama(Osaka Inst. of Tech.) / Tomohiro Yoshida(SUMITOMO ELECTRIC DEVICE INNOVATIONS) |
| Paper Information | |
| Registration To | Technical Committee on Electron Devices / Technical Committee on Bio Micro Systems / Technical Committee on Micromachine and Sensor System |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | The Influence of Humidity on the Transient Characteristics of MEMS Semiconductor Gas Sensors Varying with Gas Species |
| Sub Title (in English) | |
| Keyword(1) | |
| Keyword(2) | |
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| 1st Author's Name | Kunihiro Azuma |
| 1st Author's Affiliation | Toyama Prefectural University(Toyama Prefectural Univ.) |
| 2nd Author's Name | Takefumi Yoshikawa |
| 2nd Author's Affiliation | Toyama Prefectural University(Toyama Prefectural Univ.) |
| 3rd Author's Name | Yuki Okura |
| 3rd Author's Affiliation | Toyama Prefectural University(Toyama Prefectural Univ.) |
| 4th Author's Name | Tatsuya Iwata |
| 4th Author's Affiliation | Toyama Prefectural University(Toyama Prefectural Univ.) |
| Date | 2023-08-18 |
| Paper # | ED2023-10 |
| Volume (vol) | vol.123 |
| Number (no) | ED-155 |
| Page | pp.pp.1-5(ED), |
| #Pages | 5 |
| Date of Issue | 2023-08-11 (ED) |