Presentation 2023-08-01
Evaluation on Flip-Chip Packaging for Quantum Computers at Cryogenic Temperature
Misato Taguchi, Ryozo Takahashi, Masako Kato, Nobuhiro Kusuno, Takuji Miki, Makoto Nagata,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Quantum Computers are the most promising technologies to archive more complex calculations. At the same time, much large-number qubits are required to surpasses the performance of classical supercomputers. This paper presents the packaging structure by flip-chip stacking qubit chip on a silicon interposer, which has also interface chips or circuits, for large-scale quantum computer, and the conduction characteristics and cross-sectional structure of flip-chip silicon interposer which was cooled to cryogenic temperature (20 mK ~ 100 mK). Interface chip and silicon interposer were manufactured in 180 nm CMOS process in this work. The interposer was cooled to cryogenic temperature, and we confirmed the conduction via flip-chip stacked interface chip.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Quantum Computer / Flip-Chip Packaging / Silicon Interposer
Paper # SDM2023-37,ICD2023-16
Date of Issue 2023-07-25 (SDM, ICD)

Conference Information
Committee SDM / ICD / ITE-IST
Conference Date 2023/8/1(3days)
Place (in Japanese) (See Japanese page)
Place (in English) Hokkaido Univ. Multimedia Education Bldg. 3F
Topics (in Japanese) (See Japanese page)
Topics (in English) Analog, Mixed Analog and Digital, RF, and Sensor Interface, Low Voltage/Low Power Techniques, Novel Devices/Circuits, and the Applications
Chair Shunichiro Ohmi(Tokyo Inst. of Tech.) / Makoto Ikeda(Univ. of Tokyo) / Masayuki Ikebe(Hokkaido Univ.)
Vice Chair Tatsuya Usami(Rapidus) / Hayato Wakabayashi(Sony Semiconductor Solutions) / Takashi Komuro(Saitama Univ.) / Kazuhiro Shimonomura(Ritsmeikan Univ.) / Keiichiro Kagawa(Shizuoka Univ.)
Secretary Tatsuya Usami(Tohoku Univ.) / Hayato Wakabayashi(Panasonic) / Takashi Komuro(Kioxia) / Kazuhiro Shimonomura(Shinshu Univ.) / Keiichiro Kagawa(Tokyo Inst. of Tech.)
Assistant Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(Western Digital) / Ryo Shirai(Kyoto Univ.) / Jun Shiomi(Osaka Univ.) / Takeshi Kuboki(Sony Semiconductor Solutions) / Junichi Akita(Kanazawa Univ.)

Paper Information
Registration To Technical Committee on Silicon Device and Materials / Technical Committee on Integrated Circuits and Devices / Technical Group on Information Sensing Technologies
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Evaluation on Flip-Chip Packaging for Quantum Computers at Cryogenic Temperature
Sub Title (in English)
Keyword(1) Quantum Computer
Keyword(2) Flip-Chip Packaging
Keyword(3) Silicon Interposer
1st Author's Name Misato Taguchi
1st Author's Affiliation Kobe University(Kobe Univ.)
2nd Author's Name Ryozo Takahashi
2nd Author's Affiliation Kobe University(Kobe Univ.)
3rd Author's Name Masako Kato
3rd Author's Affiliation Hitachi, Ltd(Hitachi, Ltd)
4th Author's Name Nobuhiro Kusuno
4th Author's Affiliation Hitachi, Ltd(Hitachi, Ltd)
5th Author's Name Takuji Miki
5th Author's Affiliation Kobe University(Kobe Univ.)
6th Author's Name Makoto Nagata
6th Author's Affiliation Kobe University(Kobe Univ.)
Date 2023-08-01
Paper # SDM2023-37,ICD2023-16
Volume (vol) vol.123
Number (no) SDM-143,ICD-144
Page pp.pp.10-13(SDM), pp.10-13(ICD),
#Pages 4
Date of Issue 2023-07-25 (SDM, ICD)