| Presentation | 2023-07-07 Polygon Fracturing Method Considering Maximum Size Limit Taiki Matsuzaki, Kunihiro Fujiyoshi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The exposure data, which serves as input for variable shaped-beam mask writing, must be a set of rectangles, and it is crucial to partition the layout into as few rectangles as possible, with keeping maximum size limit. We find three types of optimal single-partitions, that ensure partitioning without increasing the number of rectangles obtained, and proved theorems. Computational experiments to evaluate the performance of combining these optimal single-partitions with greedy partitioning to Kahng's ILP method was done. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Rectilinear Polygon / Fracture / Optimal Single-Partition / Variable Shaped-Beam Mask Writing |
| Paper # | CAS2023-22,VLD2023-22,SIP2023-38,MSS2023-22 |
| Date of Issue | 2023-06-29 (CAS, VLD, SIP, MSS) |
| Conference Information | |
| Committee | MSS / CAS / SIP / VLD |
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| Conference Date | 2023/7/6(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Shingo Yamaguchi(Yamaguchi Univ.) / Yasutoshi Aibara(OmniVision) / Takayuki Nakachi(Ryukyu Univ.) / Shigetoshi Nakatake(Univ. of Kitakyushu) |
| Vice Chair | Toshiyuki Miyamoto(Osaka Inst. of Tech.) / Norihiko Shinomiya(Soka Univ.) / Koichi Ichige(Yokohama National Univ.) / Kiyoshi Nishikawa(okyo Metropolitan Univ.) / Yuichi Sakurai(Hitachi) |
| Secretary | Toshiyuki Miyamoto(Osaka Univ.) / Norihiko Shinomiya(NEC) / Koichi Ichige(Soka Univ.) / Kiyoshi Nishikawa(Renesas Electronics) / Yuichi Sakurai(Chiba Univ.) |
| Assistant | Masato Shirai(Shimane Univ.) / Nao Ito(NIT, Toyama college) / Motoi Yamaguchi(TECHNOPRO) / Shinji Shimoda(Sony Semiconductor Solutions) / Shunsuke Koshita(Hachinohe Inst. of Tech.) / Taichi Yoshida(UEC) / Sayaka Shiota(Tokyo Metropolitan Univ.) / Takuma Nishimoto(Hitachi) |
| Paper Information | |
| Registration To | Technical Committee on Mathematical Systems Science and its Applications / Technical Committee on Circuits and Systems / Technical Committee on Signal Processing / Technical Committee on VLSI Design Technologies |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Polygon Fracturing Method Considering Maximum Size Limit |
| Sub Title (in English) | |
| Keyword(1) | Rectilinear Polygon |
| Keyword(2) | Fracture |
| Keyword(3) | Optimal Single-Partition |
| Keyword(4) | Variable Shaped-Beam Mask Writing |
| 1st Author's Name | Taiki Matsuzaki |
| 1st Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| 2nd Author's Name | Kunihiro Fujiyoshi |
| 2nd Author's Affiliation | Tokyo University of Agriculture and Technology(TUAT) |
| Date | 2023-07-07 |
| Paper # | CAS2023-22,VLD2023-22,SIP2023-38,MSS2023-22 |
| Volume (vol) | vol.123 |
| Number (no) | CAS-97,VLD-98,SIP-99,MSS-100 |
| Page | pp.pp.107-112(CAS), pp.107-112(VLD), pp.107-112(SIP), pp.107-112(MSS), |
| #Pages | 6 |
| Date of Issue | 2023-06-29 (CAS, VLD, SIP, MSS) |