| Presentation | 2023-07-20 Elastic constant tensors cijE of (0001) ScxAl1-xN thin films (x=0-0.63) measured by Brillouin light scattering method Hiroki Uchida, Hayato Ichihashi, Masashi Suzuki, Shinji Takayanagi, Mami Matsukawa, Takahiko Yanagitani, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Large piezoelectricity and high Q factor in ScAlN film is attractive for RF filter applications. . Elastic constant tensors of ScAlN thin films are important parameters to design the SAW and BAW filters. In this study, elastic constant tensors (except c13E) of ScxAl1-xN films in the wide concentration range of x=0?0.63 were measured from ultrasonic velocities. In-plane bulk longitudinal wave and shear wave velocities (V11E and V66E ) in the c-axis oriented (0001) ScAlN were measured by Brillouin light scattering method with RI[Theta]A geometry. In addition, the out-of plane BAW velocities (V33D and V44E ) and kt2 in the (0001) ScAlN films were determined from the minimum point of the longitudinal wave and shear wave conversion loss curves in the HBAR, respectively. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | ScAlN films / Elastic constant / Piezoelectric thin films / Brillouin scattering / Film bulk acoustic resonators |
| Paper # | EMT2023-20,MW2023-38,OPE2023-20,EST2023-20,MWPTHz2023-16 |
| Date of Issue | 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) |
| Conference Information | |
| Committee | EST / MW / EMT / OPE / MWPTHz / IEE-EMT |
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| Conference Date | 2023/7/20(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Muroran Institute of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Workshop on Optical and Microwave technologies |
| Chair | Masayuki Kimishima(Advantest) / Kensuke Okubo(Okayama Prefectural Univ.) / Hideki Kawaguchi(Muroran Inst. of Tech) / Taro Arakawa(Yokohama National Univ.) / Atsushi Kanno(Nagoya Inst. of Tech.) / Shinichi Furukawa(Nihon Univ.) |
| Vice Chair | Takuya Sakamoto(Kyoto Univ.) / Yasuhide Tsuji(Muroran Inst. of Tech.) / Yasuo Ohtera(Toyama Prefectural Univ.) / Atsushi Sanada(Osaka Univ.) / Akihito Hirai(Mitsubishi Electric) / Yukihisa Suzuki(Tokyo Metropolitan Univ.) / / Masayuki Fujita(Osaka Univ.) / Kensuke Ikeda(CRIEPI) |
| Secretary | Takuya Sakamoto(Kozo Keikaku Engineering) / Yasuhide Tsuji(Univ. of Electro-Comm) / Yasuo Ohtera(Univ. of Electro-Comm) / Atsushi Sanada(Murata Manufacturing) / Akihito Hirai(Kyushu Sangyo Univ.) / Yukihisa Suzuki(Nihon Univ.) / (Kanto Gakuin Univ.) / Masayuki Fujita(NTT) / Kensuke Ikeda(NICT) / (NICT) |
| Assistant | Tomonori Yanagida(Advantest) / Akito Iguchi(Muroran Inst. of Tech) / Tomoyuki Furuichi(Tohoku Univ.) / Kosuke Katayama(NIT Tokuyama College) / Ryo Natsuaki(Univ. of Tokyo) / Takshi Fujisawa(Hokaido Univ.) / Hideyuki Nasu(Furukawa Electric) / Li Yi(Osaka Univ.) / Akira Satou(Tohoku Univ.) / Safumi Suzuki(Tokyo Inst. of Tech.) / Kazuki Niino(Kyoto Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Electronics Simulation Technology / Technical Committee on Microwaves / Technical Committee on Electromagnetic Theory / Technical Committee on OptoElectronics / Technical Committee on Microwave Photonics and Terahertz Photonic-Electronic Technologies / Technical Meeting on Electromagnetic Theory |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Elastic constant tensors cijE of (0001) ScxAl1-xN thin films (x=0-0.63) measured by Brillouin light scattering method |
| Sub Title (in English) | |
| Keyword(1) | ScAlN films |
| Keyword(2) | Elastic constant |
| Keyword(3) | Piezoelectric thin films |
| Keyword(4) | Brillouin scattering |
| Keyword(5) | Film bulk acoustic resonators |
| Keyword(6) | |
| 1st Author's Name | Hiroki Uchida |
| 1st Author's Affiliation | Waseda University(Waseda Univ.) |
| 2nd Author's Name | Hayato Ichihashi |
| 2nd Author's Affiliation | Doshisya University(Doshisya Univ.) |
| 3rd Author's Name | Masashi Suzuki |
| 3rd Author's Affiliation | Yamanashi University(Yamanashi Univ.) |
| 4th Author's Name | Shinji Takayanagi |
| 4th Author's Affiliation | Doshisya University(Doshisya Univ.) |
| 5th Author's Name | Mami Matsukawa |
| 5th Author's Affiliation | Doshisya University(Doshisya Univ.) |
| 6th Author's Name | Takahiko Yanagitani |
| 6th Author's Affiliation | Waseda University(Waseda Univ.) |
| Date | 2023-07-20 |
| Paper # | EMT2023-20,MW2023-38,OPE2023-20,EST2023-20,MWPTHz2023-16 |
| Volume (vol) | vol.123 |
| Number (no) | EMT-114,MW-115,OPE-116,EST-117,MWPTHz-118 |
| Page | pp.pp.61-66(EMT), pp.61-66(MW), pp.61-66(OPE), pp.61-66(EST), pp.61-66(MWPTHz), |
| #Pages | 6 |
| Date of Issue | 2023-07-13 (EMT, MW, OPE, EST, MWPTHz) |