| Presentation | 2023-06-15 CNN-based cause analysis of metrology data mismatch between multiple CD-SEMs Naoya Tanahashi, Shintaro Takada, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
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| Paper # | R2023-8 |
| Date of Issue | 2023-06-08 (R) |
| Conference Information | |
| Committee | R |
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| Conference Date | 2023/6/15(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Kikai-Shinko-Kaikan Bldg. |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Reliability General |
| Chair | Yasushi Kadota(Ricoh) |
| Vice Chair | Hiroyuki Okamura(Hiroshima Univ.) |
| Secretary | Hiroyuki Okamura(Hosei Univ.) |
| Assistant | Shinji Yokogawa(Univ. of Electro-Comm.) / Takahide Yoshikawa(Fujitsu Lab.) / Shuhei Ota(Kanagawa Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Reliability |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | CNN-based cause analysis of metrology data mismatch between multiple CD-SEMs |
| Sub Title (in English) | |
| Keyword(1) | |
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| 1st Author's Name | Naoya Tanahashi |
| 1st Author's Affiliation | Hitachi Ltd.(Hitachi) |
| 2nd Author's Name | Shintaro Takada |
| 2nd Author's Affiliation | Hitachi Ltd.(Hitachi) |
| Date | 2023-06-15 |
| Paper # | R2023-8 |
| Volume (vol) | vol.123 |
| Number (no) | R-78 |
| Page | pp.pp.7-11(R), |
| #Pages | 5 |
| Date of Issue | 2023-06-08 (R) |