| Presentation | 2023-05-19 [Invited Talk] Repeated bending endurance test of zinc oxide thin films deposited at room temperature on flexible substrates Toshihiko Maemoto, Kazuyori Oura, Hideo Wada, Masatoshi Koyama, Shigehiko Sasa, Ahikiko Fujii, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We investigated the device structure of oxide thin-film devices that can operate even when bending, the evaluation of their bending durability, and the fracture mechanism under bending to develop flexible applications of oxide semiconductors. ZnO thin-films were deposited on Cyclo-Olefin-Polymer (COP) substrates using the Pulsed Laser Deposition (PLD) method, and the thin-films were tested using a cyclic bending tester. After the cyclic bending tests, surface observations, crystallinity evaluations, and electrical property measurements were conducted, and the dependence on substrate thickness was evaluated. Using nanoindentation, we discussed the failure mechanism of the samples in the bending tests and determined the optimal sample structure for flexible devices. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Oxide Semiconductor / Zinc Oxide / Flexible / COP / Nanoindentation |
| Paper # | ED2023-1,CPM2023-1,SDM2023-18 |
| Date of Issue | 2023-05-12 (ED, CPM, SDM) |
| Conference Information | |
| Committee | CPM / ED / SDM |
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| Conference Date | 2023/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Institute of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) / Hiroki Fujishiro(Tokyo Univ. of Science) / Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Hideki Nakazawa(Hirosaki Univ.) / Seiya Sakai(Hokkaido Univ.) / Tatsuya Usami(ASM Japan) |
| Secretary | Hideki Nakazawa(Ehime Univ.) / Seiya Sakai(Kitami Inst. of Tech) / Tatsuya Usami(Saga Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Noriko Bamba(Shinshu Univ.) / Masatoshi Koyama(Osaka Inst. of Tech.) / Yoshitugu Yamamoto(Mitsubishi Electric) / Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Electron Devices / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] Repeated bending endurance test of zinc oxide thin films deposited at room temperature on flexible substrates |
| Sub Title (in English) | |
| Keyword(1) | Oxide Semiconductor |
| Keyword(2) | Zinc Oxide |
| Keyword(3) | Flexible |
| Keyword(4) | COP |
| Keyword(5) | Nanoindentation |
| 1st Author's Name | Toshihiko Maemoto |
| 1st Author's Affiliation | Osaka Institute of Technology(Osaka Inst. of Tech.) |
| 2nd Author's Name | Kazuyori Oura |
| 2nd Author's Affiliation | Osaka Institute of Technology(Osaka Inst. of Tech.) |
| 3rd Author's Name | Hideo Wada |
| 3rd Author's Affiliation | Osaka Institute of Technology(Osaka Inst. of Tech.) |
| 4th Author's Name | Masatoshi Koyama |
| 4th Author's Affiliation | Osaka Institute of Technology(Osaka Inst. of Tech.) |
| 5th Author's Name | Shigehiko Sasa |
| 5th Author's Affiliation | Osaka Institute of Technology(Osaka Inst. of Tech.) |
| 6th Author's Name | Ahikiko Fujii |
| 6th Author's Affiliation | Osaka Institute of Technology(Osaka Inst. of Tech.) |
| Date | 2023-05-19 |
| Paper # | ED2023-1,CPM2023-1,SDM2023-18 |
| Volume (vol) | vol.123 |
| Number (no) | ED-41,CPM-42,SDM-43 |
| Page | pp.pp.1-6(ED), pp.1-6(CPM), pp.1-6(SDM), |
| #Pages | 6 |
| Date of Issue | 2023-05-12 (ED, CPM, SDM) |