| Presentation | 2023-05-19 Study of device isolation technology of AlGaN/GaN high-electron-mobility transistors for their integration Tatsuya Akamatsu, Yoshiki Akira, Hiroshi Okada, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | ED2023-8,CPM2023-8,SDM2023-25 |
| Date of Issue | 2023-05-12 (ED, CPM, SDM) |
| Conference Information | |
| Committee | CPM / ED / SDM |
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| Conference Date | 2023/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Institute of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) / Hiroki Fujishiro(Tokyo Univ. of Science) / Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Hideki Nakazawa(Hirosaki Univ.) / Seiya Sakai(Hokkaido Univ.) / Tatsuya Usami(ASM Japan) |
| Secretary | Hideki Nakazawa(Ehime Univ.) / Seiya Sakai(Kitami Inst. of Tech) / Tatsuya Usami(Saga Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Noriko Bamba(Shinshu Univ.) / Masatoshi Koyama(Osaka Inst. of Tech.) / Yoshitugu Yamamoto(Mitsubishi Electric) / Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Electron Devices / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study of device isolation technology of AlGaN/GaN high-electron-mobility transistors for their integration |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Tatsuya Akamatsu |
| 1st Author's Affiliation | Toyohashi University of Technology(TUT) |
| 2nd Author's Name | Yoshiki Akira |
| 2nd Author's Affiliation | Toyohashi University of Technology(TUT) |
| 3rd Author's Name | Hiroshi Okada |
| 3rd Author's Affiliation | Toyohashi University of Technology(TUT) |
| Date | 2023-05-19 |
| Paper # | ED2023-8,CPM2023-8,SDM2023-25 |
| Volume (vol) | vol.123 |
| Number (no) | ED-41,CPM-42,SDM-43 |
| Page | pp.pp.32-35(ED), pp.32-35(CPM), pp.32-35(SDM), |
| #Pages | 4 |
| Date of Issue | 2023-05-12 (ED, CPM, SDM) |