Presentation	2023-04-10 12-nm FinFETおよび28-nm プレナー型SRAMのミューオン起因ソフトエラー断面積の評価 , , , , , , , , , , , , , , ,
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Paper #	ICD2023-3
Date of Issue	2023-04-03 (ICD)

Conference Information
Committee	ICD
Conference Date	2023/4/10(2days)
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Chair	Masafumi Takahashi(Kioxia)
Vice Chair	Makoto Ikeda(Univ. of Tokyo)
Secretary	Makoto Ikeda(TSMC)
Assistant	Yoshiaki Yoshihara(Kioxia) / Jun Shiomi(Osaka Univ.) / Takeshi Kuboki(Sony Semiconductor Solutions)

Paper Information
Registration To	Technical Committee on Integrated Circuits and Devices
Language	JPN-ONLY
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Date	2023-04-10
Paper #	ICD2023-3
Volume (vol)	vol.123
Number (no)	ICD-1
Page	pp.pp.8-8(ICD),
#Pages	1
Date of Issue	2023-04-03 (ICD)