| Presentation | 2023-04-11 [Invited Talk] NanoBridge Technology for Embedded Nonvolatile Memory Ryusuke Nebashi, Koichiro Okamoto, Toshitsugu Sakamoto, Munehiro Tada, |
|---|---|
| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | NanoBridge (NB) is a kind of electrochemical resistive-change device. NBs are integrated by only two additional masks in a standard Cu-BEOL without scarifying CMOS performance. The newly developed split Cu electrode enables the lower set voltage, which have been demonstrated in a 28 nm-node. High density embedded nonvolatile NB memory macro in a 65nm technology is successfully developed with P/E=30ns/30ns programming. High yield is achieved with satisfying 30ns read, and more than 10 years retention at 150°C. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | memory / nonvolatile / CBRAM / ReRAM / conducting bridge / nanobridge / atom switch |
| Paper # | ICD2023-11 |
| Date of Issue | 2023-04-03 (ICD) |
| Conference Information | |
| Committee | ICD |
|---|---|
| Conference Date | 2023/4/10(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Masafumi Takahashi(Kioxia) |
| Vice Chair | Makoto Ikeda(Univ. of Tokyo) |
| Secretary | Makoto Ikeda(TSMC) |
| Assistant | Yoshiaki Yoshihara(Kioxia) / Jun Shiomi(Osaka Univ.) / Takeshi Kuboki(Sony Semiconductor Solutions) |
| Paper Information | |
| Registration To | Technical Committee on Integrated Circuits and Devices |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | [Invited Talk] NanoBridge Technology for Embedded Nonvolatile Memory |
| Sub Title (in English) | |
| Keyword(1) | memory |
| Keyword(2) | nonvolatile |
| Keyword(3) | CBRAM |
| Keyword(4) | ReRAM |
| Keyword(5) | conducting bridge |
| Keyword(6) | nanobridge |
| Keyword(7) | atom switch |
| 1st Author's Name | Ryusuke Nebashi |
| 1st Author's Affiliation | NanoBridge Semiconductor, Inc(NBS) |
| 2nd Author's Name | Koichiro Okamoto |
| 2nd Author's Affiliation | NanoBridge Semiconductor, Inc(NBS) |
| 3rd Author's Name | Toshitsugu Sakamoto |
| 3rd Author's Affiliation | NanoBridge Semiconductor, Inc(NBS) |
| 4th Author's Name | Munehiro Tada |
| 4th Author's Affiliation | NanoBridge Semiconductor, Inc(NBS) |
| Date | 2023-04-11 |
| Paper # | ICD2023-11 |
| Volume (vol) | vol.123 |
| Number (no) | ICD-1 |
| Page | pp.pp.24-28(ICD), |
| #Pages | 5 |
| Date of Issue | 2023-04-03 (ICD) |