| Presentation | 2023-05-19 Micro Periodic Structures (LIPSS) Formed on Si Substrates Using Near-Infrared Free Electron Laser Irradiation Youta Hoshino, Nohira Masayoshi, Nobuyuki Iwata, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We attempted to create Laser-Induced Periodic Surface Structures (LIPSS) by irradiating the Free Electron Laser (FEL) to the low-resistance N-type Si substrate with in the near-infrared region. Using the second harmonic laser generated from a non-linear crystal with a wavelength range of 900 nm to 1200 nm, we successfully created LIPSS with intervals shorter than the wavelength on the irradiation area. We found that the periodic distance of the one dimensional featured structures became wider in proportion to the wavelength: with intervals of 670, 900, and 970 nm at a wavelength of 900, 1100 nm and 1200 nm, respectively. Additionally, we succeeded in creating LIPSS with intervals of approximately 750 nm using a wavelength of 3500 nm FEL. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LIPSS / Free Electron Laser / FEL / Microscale periodic structures |
| Paper # | ED2023-3,CPM2023-3,SDM2023-20 |
| Date of Issue | 2023-05-12 (ED, CPM, SDM) |
| Conference Information | |
| Committee | CPM / ED / SDM |
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| Conference Date | 2023/5/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Nagoya Institute of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) / Hiroki Fujishiro(Tokyo Univ. of Science) / Shunichiro Ohmi(Tokyo Inst. of Tech.) |
| Vice Chair | Hideki Nakazawa(Hirosaki Univ.) / Seiya Sakai(Hokkaido Univ.) / Tatsuya Usami(ASM Japan) |
| Secretary | Hideki Nakazawa(Ehime Univ.) / Seiya Sakai(Kitami Inst. of Tech) / Tatsuya Usami(Saga Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Noriko Bamba(Shinshu Univ.) / Masatoshi Koyama(Osaka Inst. of Tech.) / Yoshitugu Yamamoto(Mitsubishi Electric) / Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials / Technical Committee on Electron Devices / Technical Committee on Silicon Device and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Micro Periodic Structures (LIPSS) Formed on Si Substrates Using Near-Infrared Free Electron Laser Irradiation |
| Sub Title (in English) | |
| Keyword(1) | LIPSS |
| Keyword(2) | Free Electron Laser |
| Keyword(3) | FEL |
| Keyword(4) | Microscale periodic structures |
| 1st Author's Name | Youta Hoshino |
| 1st Author's Affiliation | Nihon University(Nihon Univ.) |
| 2nd Author's Name | Nohira Masayoshi |
| 2nd Author's Affiliation | Nihon University(Nihon Univ.) |
| 3rd Author's Name | Nobuyuki Iwata |
| 3rd Author's Affiliation | Nihon University(Nihon Univ.) |
| Date | 2023-05-19 |
| Paper # | ED2023-3,CPM2023-3,SDM2023-20 |
| Volume (vol) | vol.123 |
| Number (no) | ED-41,CPM-42,SDM-43 |
| Page | pp.pp.11-15(ED), pp.11-15(CPM), pp.11-15(SDM), |
| #Pages | 5 |
| Date of Issue | 2023-05-12 (ED, CPM, SDM) |