| Presentation | 2023-04-22 Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne Tatsuya Okada, C. J. Koswaththage, Takashi Kajiwar, Taizoh Sadoh, Takashi Noguchi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | For realizing high crystallinity InSb films on low-cost insulating substrate, we investigate the crystallization using RTA of the InSb films deposited by RF sputtering using Ne or Ar gas on glass substrate. By using Ne gas, higher Hall mobility of 2010 cm2/Vs was obtained with shorter RTA duration. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InSb / Rapid Thermal Annealing / Sputtering / Ne |
| Paper # | SDM2023-8,OME2023-8 |
| Date of Issue | 2023-04-14 (SDM, OME) |
| Conference Information | |
| Committee | SDM / OME |
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| Conference Date | 2023/4/21(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawaken Seinen Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) / Toshiki Yamada(NICT) |
| Vice Chair | Tatsuya Usami(ASM Japan) / Eiji Itoh(Shinshu Univ.) |
| Secretary | Tatsuya Usami(Tohoku Univ.) / Eiji Itoh(Panasonic) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) / Yoshiyuki Seike(Aichi Inst. of Tech.) / Akira Baba(Niigata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne |
| Sub Title (in English) | |
| Keyword(1) | InSb |
| Keyword(2) | Rapid Thermal Annealing |
| Keyword(3) | Sputtering |
| Keyword(4) | Ne |
| 1st Author's Name | Tatsuya Okada |
| 1st Author's Affiliation | University of the Ryukyus(Univ. Ryukyus) |
| 2nd Author's Name | C. J. Koswaththage |
| 2nd Author's Affiliation | University of the Ryukyus(Univ. Ryukyus) |
| 3rd Author's Name | Takashi Kajiwar |
| 3rd Author's Affiliation | Kyushu University(Kyushu Univ) |
| 4th Author's Name | Taizoh Sadoh |
| 4th Author's Affiliation | Kyushu University(Kyushu Univ) |
| 5th Author's Name | Takashi Noguchi |
| 5th Author's Affiliation | University of the Ryukyus(Univ. Ryukyus) |
| Date | 2023-04-22 |
| Paper # | SDM2023-8,OME2023-8 |
| Volume (vol) | vol.123 |
| Number (no) | SDM-8,OME-9 |
| Page | pp.pp.30-31(SDM), pp.30-31(OME), |
| #Pages | 2 |
| Date of Issue | 2023-04-14 (SDM, OME) |