| Presentation | 2023-04-22 Development of wafer temperature measurement system for non-contact temperature measurement during plasma process Ryunosuke Goto, Kenshiro Horiuchi, Jiawen Yu, Hiroaki Hanafusa, Seiichiro Higashi, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | SDM2023-17,OME2023-17 |
| Date of Issue | 2023-04-14 (SDM, OME) |
| Conference Information | |
| Committee | SDM / OME |
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| Conference Date | 2023/4/21(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Okinawaken Seinen Kaikan |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | Thin film devices (Si, compound, organic, flexible), Biotechnology, Materials, Characterization, etc. |
| Chair | Shunichiro Ohmi(Tokyo Inst. of Tech.) / Toshiki Yamada(NICT) |
| Vice Chair | Tatsuya Usami(ASM Japan) / Eiji Itoh(Shinshu Univ.) |
| Secretary | Tatsuya Usami(Tohoku Univ.) / Eiji Itoh(Panasonic) |
| Assistant | Takuji Hosoi(Kwansei Gakuin Univ.) / Takuya Futase(SanDisk) / Yoshiyuki Seike(Aichi Inst. of Tech.) / Akira Baba(Niigata Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Silicon Device and Materials / Technical Committee on Organic Molecular Electronics |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of wafer temperature measurement system for non-contact temperature measurement during plasma process |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Ryunosuke Goto |
| 1st Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 2nd Author's Name | Kenshiro Horiuchi |
| 2nd Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 3rd Author's Name | Jiawen Yu |
| 3rd Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 4th Author's Name | Hiroaki Hanafusa |
| 4th Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| 5th Author's Name | Seiichiro Higashi |
| 5th Author's Affiliation | Hiroshima University(Hiroshima Univ.) |
| Date | 2023-04-22 |
| Paper # | SDM2023-17,OME2023-17 |
| Volume (vol) | vol.123 |
| Number (no) | SDM-8,OME-9 |
| Page | pp.pp.63-66(SDM), pp.63-66(OME), |
| #Pages | 4 |
| Date of Issue | 2023-04-14 (SDM, OME) |