| Presentation | 2023-03-01 High fidelity mask pattern generation method by amplitude component evaluation Yu Horimoto, Sota Saito, Atsushi Takahashi, Yukihide Kohira, Chikaaki Kodama, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | VLD2022-79,HWS2022-50 |
| Date of Issue | 2023-02-22 (VLD, HWS) |
| Conference Information | |
| Committee | HWS / VLD |
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| Conference Date | 2023/3/1(4days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Makoto Nagata(Kobe Univ.) / Minako Ikeda(NTT) |
| Vice Chair | Yuichi Hayashi(NAIST) / Daisuke Suzuki(Mitsubishi Electric) / Shigetoshi Nakatake(Univ. of Kitakyushu) |
| Secretary | Yuichi Hayashi(Sony Semiconductor Solutions) / Daisuke Suzuki(NAIST) / Shigetoshi Nakatake(NBS) |
| Assistant | / Takuma Nishimoto(Hitachi) |
| Paper Information | |
| Registration To | Technical Committee on Hardware Security / Technical Committee on VLSI Design Technologies |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | High fidelity mask pattern generation method by amplitude component evaluation |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Yu Horimoto |
| 1st Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 2nd Author's Name | Sota Saito |
| 2nd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 3rd Author's Name | Atsushi Takahashi |
| 3rd Author's Affiliation | Tokyo Institute of Technology(Tokyo Tech) |
| 4th Author's Name | Yukihide Kohira |
| 4th Author's Affiliation | The University of Aizu(Univ. of Aizu) |
| 5th Author's Name | Chikaaki Kodama |
| 5th Author's Affiliation | KIOXIA Corporation(KIOXIA) |
| Date | 2023-03-01 |
| Paper # | VLD2022-79,HWS2022-50 |
| Volume (vol) | vol.122 |
| Number (no) | VLD-402,HWS-403 |
| Page | pp.pp.37-42(VLD), pp.37-42(HWS), |
| #Pages | 6 |
| Date of Issue | 2023-02-22 (VLD, HWS) |