| Presentation | 2023-02-28 Fabrication and evaluation of ZnO-TiO2 composite oxide films using room temperature atomic layer deposition Haruto Suzuki, Kentaro Saito, Kensaku Kanomata, Masanori Miura, Bashir Ahmmand, Fumihiko Hirose, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | |
| Paper # | CPM2022-86 |
| Date of Issue | 2023-02-21 (CPM) |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2023/2/28(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Tokyo University of Technology |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Yuichi Nakamura(Toyohashi Univ. of Tech.) |
| Vice Chair | Hideki Nakazawa(Hirosaki Univ.) |
| Secretary | Hideki Nakazawa(Ehime Univ.) |
| Assistant | Yasuo Kimura(Tokyo Univ. of Tech.) / Fumihiko Hirose(Yamagata Univ.) / Noriko Bamba(Shinshu Univ.) |
| Paper Information | |
| Registration To | Technical Committee on Component Parts and Materials |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication and evaluation of ZnO-TiO2 composite oxide films using room temperature atomic layer deposition |
| Sub Title (in English) | |
| Keyword(1) | |
| 1st Author's Name | Haruto Suzuki |
| 1st Author's Affiliation | Yamagata Univesity(Yamagata Univ) |
| 2nd Author's Name | Kentaro Saito |
| 2nd Author's Affiliation | Yamagata Univesity(Yamagata Univ) |
| 3rd Author's Name | Kensaku Kanomata |
| 3rd Author's Affiliation | Yamagata Univesity(Yamagata Univ) |
| 4th Author's Name | Masanori Miura |
| 4th Author's Affiliation | Yamagata Univesity(Yamagata Univ) |
| 5th Author's Name | Bashir Ahmmand |
| 5th Author's Affiliation | Yamagata Univesity(Yamagata Univ) |
| 6th Author's Name | Fumihiko Hirose |
| 6th Author's Affiliation | Yamagata Univesity(Yamagata Univ) |
| Date | 2023-02-28 |
| Paper # | CPM2022-86 |
| Volume (vol) | vol.122 |
| Number (no) | CPM-392 |
| Page | pp.pp.5-8(CPM), |
| #Pages | 4 |
| Date of Issue | 2023-02-21 (CPM) |