| Presentation | 2023-01-27 Low - pressure CVD of hexagonal BN thin films at high temperatures Taiki Oishi, Taira Watanabe, Yuki Tanaka, Katsumi Masuda, Riku Yoshioka, Kirari Masuda, Hiroko Kominami, Kazuhiko Hara, |
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| PDF Download Page |  PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | To further improve quality of hexagonal boron nitride (h-BN) thin films grown on c-plane sapphire by a low - pressure chemical vapor deposition (CVD) method with BCl? and NH?, we have optimized the growth conditions at higher growth temperatures, Tg, than before. At Tg = 1300 ℃, optimizing the NH? flow rate significantly improved the luminescence property compared to those grow at 1200 ℃. At Tg = 1400 ℃, the luminescence property was most improved at growth pressure, Pg = 7.5 kPa, which is lower than the optimal Pg of 15 kPa at 1200 and 1300 ℃. However, the improvement of film quality was not achieved at Tg = 1400 ℃. At even higher Tg, the growth conditions need to be further investigated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | hexagonal boron nitride / CVD / thin film / excitonic luminescence |
| Paper # | EID2022-8 |
| Date of Issue | 2023-01-19 (EID) |
| Conference Information | |
| Committee | ITE-IDY / IEIJ-SSL / EID / SID-JC / IEE-EDD |
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| Conference Date | 2023/1/26(2days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | Online (Zoom) |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | Takahiro Ishinabe(Tohoku Univ.) / / Masahiro Yamaguchi(Tokyo Inst. of Tech.) |
| Vice Chair | / / Masayuki Kanbara(NAIST) / Tomoyuki Ishihara(Japan Display) |
| Secretary | (Shizuoka Univ.) / (Tohoku Univ.) / Masayuki Kanbara / Tomoyuki Ishihara(NTT) / (SHARP) |
| Assistant | / / Hiroshi Tsuji(NHK) / Mutsumi Kimura(Ryukoku Univ.) / Tomokazu Shiga(Univ. of Electro-Comm.) / Hiroko Kominami(Shizuoka Univ.) / Rumiko Yamaguchi(Akita Univ.) / Mitsuhiro Akimoto(Sanyo-Onoda City Univ) |
| Paper Information | |
| Registration To | Technical Group on Information Display / * / Technical Committee on Electronic Information Displays / Society for Informtion Display Japan Chapter / Technical Group on Electron Devices |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Low - pressure CVD of hexagonal BN thin films at high temperatures |
| Sub Title (in English) | |
| Keyword(1) | hexagonal boron nitride |
| Keyword(2) | CVD |
| Keyword(3) | thin film |
| Keyword(4) | excitonic luminescence |
| 1st Author's Name | Taiki Oishi |
| 1st Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 2nd Author's Name | Taira Watanabe |
| 2nd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 3rd Author's Name | Yuki Tanaka |
| 3rd Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 4th Author's Name | Katsumi Masuda |
| 4th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 5th Author's Name | Riku Yoshioka |
| 5th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 6th Author's Name | Kirari Masuda |
| 6th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 7th Author's Name | Hiroko Kominami |
| 7th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| 8th Author's Name | Kazuhiko Hara |
| 8th Author's Affiliation | Shizuoka University(Shizuoka Univ.) |
| Date | 2023-01-27 |
| Paper # | EID2022-8 |
| Volume (vol) | vol.122 |
| Number (no) | EID-366 |
| Page | pp.pp.17-20(EID), |
| #Pages | 4 |
| Date of Issue | 2023-01-19 (EID) |